Abstract

Laser-frequency-based displacement metrology and a control system directly traceable to a time standard are developed. The setup is based on a Fabry–Perot (FP) cavity. Two resonant frequencies of the FP cavity are probed for displacement measurement. An optical-frequency-comb generator is utilized to improve the measurement resolution. A displacement resolution of approximately 1.3nm was achieved, and displacement control using a phase-locked loop was demonstrated.

© 2009 Optical Society of America

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