Abstract

SiGd multilayers designed as narrowband reflective coatings near 63nm were developed. The highest peak reflectance of 26.2% at a 5° incident angle was obtained at 62nm, and the spectral bandwidth was 7.3nm FWHM. The fits for x-ray and extreme ultraviolet reflectance data of SiGd multilayers indicate the possibility of silicide formation at the SiGd interfaces. B4C, W, and SiN were deposited as interface barrier layers to improve the reflectance of SiGd multilayers. More than an 8% increase in reflectance was observed from the interface-engineered SiWGd and SiB4CGd multilayers.

© 2008 Optical Society of America

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2006

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Appl. Opt. 45, 1765 (2006).
[CrossRef] [PubMed]

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

2005

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

2001

S. Bajt, D. G. Stearns, and P. A. Kearney, J. Appl. Phys. 90, 15 (2001).
[CrossRef]

1999

B. N. Handy, L. W. Acton, C. C. Kankelborg, and 43 coauthors, Sol. Phys. 187, 229 (1999).
[CrossRef]

1998

D. L. Windt, Comput. Phys. 12, 360 (1998).
[CrossRef]

1995

J. P. Delaboudinière and the SOHO mission group, Sol. Phys. 162, 291 (1995).
[CrossRef]

S. V. Meschel and O. J. Kleppa, J. Alloys Compd. 217, 235 (1995).
[CrossRef]

1993

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Acton, L. W.

B. N. Handy, L. W. Acton, C. C. Kankelborg, and 43 coauthors, Sol. Phys. 187, 229 (1999).
[CrossRef]

Aquila, A. L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Bajt, S.

S. Bajt, D. G. Stearns, and P. A. Kearney, J. Appl. Phys. 90, 15 (2001).
[CrossRef]

Baker, S. L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Delaboudinière, J. P.

J. P. Delaboudinière and the SOHO mission group, Sol. Phys. 162, 291 (1995).
[CrossRef]

Dollar, F. J.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Golub, L.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Gullikson, E. M.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Handy, B. N.

B. N. Handy, L. W. Acton, C. C. Kankelborg, and 43 coauthors, Sol. Phys. 187, 229 (1999).
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Kankelborg, C. C.

B. N. Handy, L. W. Acton, C. C. Kankelborg, and 43 coauthors, Sol. Phys. 187, 229 (1999).
[CrossRef]

Kearney, P. A.

S. Bajt, D. G. Stearns, and P. A. Kearney, J. Appl. Phys. 90, 15 (2001).
[CrossRef]

Kjornrattanawanich, B.

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Appl. Opt. 45, 1765 (2006).
[CrossRef] [PubMed]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Kleppa, O. J.

S. V. Meschel and O. J. Kleppa, J. Alloys Compd. 217, 235 (1995).
[CrossRef]

Meschel, S. V.

S. V. Meschel and O. J. Kleppa, J. Alloys Compd. 217, 235 (1995).
[CrossRef]

Robinson, J. C.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Seely, J. F.

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Appl. Opt. 45, 1765 (2006).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Soufli, R.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Spiller, E.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

Stearns, D. G.

S. Bajt, D. G. Stearns, and P. A. Kearney, J. Appl. Phys. 90, 15 (2001).
[CrossRef]

Uspenskii, Y.

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Appl. Opt. 45, 1765 (2006).
[CrossRef] [PubMed]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

Windt, D. L.

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Appl. Opt. 45, 1765 (2006).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

D. L. Windt, Comput. Phys. 12, 360 (1998).
[CrossRef]

Appl. Opt.

At. Data Nucl. Data Tables

B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Comput. Phys.

D. L. Windt, Comput. Phys. 12, 360 (1998).
[CrossRef]

J. Alloys Compd.

S. V. Meschel and O. J. Kleppa, J. Alloys Compd. 217, 235 (1995).
[CrossRef]

J. Appl. Phys.

S. Bajt, D. G. Stearns, and P. A. Kearney, J. Appl. Phys. 90, 15 (2001).
[CrossRef]

Proc. SPIE

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, Proc. SPIE 5901, 59010M (2005).
[CrossRef]

J. F. Seely, Y. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, Proc. SPIE 6317, 63170T (2006).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, Y. Uspenskii, and J. F. Seely, Proc. SPIE 6317, 63170U (2006).
[CrossRef]

Sol. Phys.

J. P. Delaboudinière and the SOHO mission group, Sol. Phys. 162, 291 (1995).
[CrossRef]

B. N. Handy, L. W. Acton, C. C. Kankelborg, and 43 coauthors, Sol. Phys. 187, 229 (1999).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Measured XRR reflectance of a Si Gd multilayer and the XRR fits using (a) two-layer model, (b) and (c) four-layer model with Gd 5 Si 3 and GdSi 2 formation at the interfaces, respectively.

Fig. 2
Fig. 2

Measured EUV reflectance of a Si Gd multilayer compared with the reflectances calculated using the best EUV and XRR fit parameters.

Fig. 3
Fig. 3

Measured EUV reflectance of interface-engineered Si Gd multilayers as a function of B 4 C , W, and SiN barrier layer thicknesses.

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