Abstract

We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As2S3 films. The device simultaneously features a small footprint of 0.012mm×0.012mm, a cavity Q (quality factor) of 10,000, and an extinction ratio of 32dB. These resonators exhibit a very high sensitivity to refractive index changes with a demonstrated detection capability of ΔnAs2S3=(4.5×106±10%) refractive index unit. The resonators were applied to derive a photorefractive response of As2S3 to λ=550nm light. The resonator devices are a versatile platform for both sensing and glass material property investigation.

© 2008 Optical Society of America

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