A monolithically integrated eight-channel optical multiplexer (Mux) with a channel spacing is presented based on a silicon-on-insulator rib waveguide and an asymmetric Mach–Zehnder interferometer. All channels were optimized independently with integrated heaters. The fully tuned Mux shows an adjacent channel isolation of , an excess loss of , and a channel uniformity of over a wavelength span. In addition, the phase tuning efficiency for different interlevel dielectric layer thicknesses and thermal crosstalk were investigated.
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