Abstract

A monolithically integrated eight-channel optical multiplexer (Mux) with a 400GHz channel spacing 1550nm is presented based on a silicon-on-insulator rib waveguide and an asymmetric Mach–Zehnder interferometer. All channels were optimized independently with integrated heaters. The fully tuned Mux shows an adjacent channel isolation of 13dB, an excess loss of 2.6dB, and a channel uniformity of 1.5dB over a 25nm wavelength span. In addition, the phase tuning efficiency for different interlevel dielectric layer thicknesses and thermal crosstalk were investigated.

© 2008 Optical Society of America

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References

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H. Uetsuka, IEEE J. Sel. Top. Quantum Electron. 10, 393 (2004).
[Crossref]

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M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

1999 (1)

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

1998 (1)

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

1997 (1)

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

Bezinger, A.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Chabloz, M.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Chetrit, Y.

Ciftcioglu, B.

Cohen, O.

Coppinger, F.

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

Dainesi, P.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Declerq, M.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Delage, A.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Fazan, P.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Flückiger, Ph.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Fraser, J. W.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Hak, D.

Hunziker, W.

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

Ionescu, A.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Iwashita, K.

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Izhaky, N.

Jalali, B.

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

Janz, S.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Jessop, P. E.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Jones, R.

Knights, A. P.

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2003), p. 92.

Küng, A.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Lagos, A.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Lai, Q.

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

Lanker, M.

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

Liao, L.

Liu, A.

Melchior, H.

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

Namiki, S.

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Nguyen, H.

Ozawa, S.

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Paniccia, M.

Pearson, M. R. T.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Reed, G. T.

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2003), p. 92.

Renaud, Ph.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Robert, Ph.

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

Rong, H.

Rubin, D.

Tanaka, K.

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Tashiro, Y.

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Trinh, P. D.

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

Uetsuka, H.

H. Uetsuka, IEEE J. Sel. Top. Quantum Electron. 10, 393 (2004).
[Crossref]

Xu, D.-X.

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Yegnanarayanan, S.

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

Electron. Lett. (1)

Q. Lai, M. Lanker, W. Hunziker, and H. Melchior, Electron. Lett. 34, 266 (1998).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

H. Uetsuka, IEEE J. Sel. Top. Quantum Electron. 10, 393 (2004).
[Crossref]

IEEE Photon. Technol. Lett. (2)

P. D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, IEEE Photon. Technol. Lett. 9, 940 (1997).
[Crossref]

P. Dainesi, A. Küng, M. Chabloz, A. Lagos, Ph. Flückiger, A. Ionescu, P. Fazan, M. Declerq, Ph. Renaud, and Ph. Robert, IEEE Photon. Technol. Lett. 10, 660 (2000).
[Crossref]

J. Lightwave Technol. (1)

OFC Techn. Digest (1)

K. Tanaka, K. Iwashita, Y. Tashiro, S. Namiki, and S. Ozawa, OFC Techn. Digest 1, 88 (1999).

Opt. Express (1)

Proc. SPIE (1)

M. R. T. Pearson, A. Bezinger, A. Delage, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, Proc. SPIE 3953, 11 (2000).
[Crossref]

Other (1)

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2003), p. 92.

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Figures (4)

Fig. 1
Fig. 1 Micrograph and schematics of an eight-channel Mux based on AMZIs; 4 Δ L = 97.2 μ m for Δ λ = 3.2 nm 1550 nm , where Δ L and Δ λ are the difference in length between two arms of the AMZI and channel spacing ( 3.2 nm ) , respectively.
Fig. 2
Fig. 2 Cross sectional SEM pictures of an SOI rib waveguide. (a) ILD thickness= 5 μ m , (b) waveguide width ( W ) = 0.55 μ m , ridge waveguide height ( H ) = 0.5 μ m , and rib etch depth ( h ) = 0.2 μ m .
Fig. 3
Fig. 3 Phase tuning efficiency; (a) phase shifts caused by the heater employed in stage 1 for different ILD thicknesses and (b) power consumed for the π-phase shift for each stage.
Fig. 4
Fig. 4 Spectra of all eight channel Mux outputs (a) before tuning and (b) after tuning.

Equations (2)

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s = λ 0 2 2 n g ( 4 Δ L ) ,
η = 2 Δ λ FSR ,

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