Abstract

We report a dramatic improvement of the spatial coherence and beam divergence (0.66mrad) of a 13.2nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

© 2008 Optical Society of America

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References

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2008 (1)

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, Nat. Photonics 2, 94 (2008).
[Crossref]

2007 (3)

2006 (1)

Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, Phys. Rev. Lett. 97, 123901 (2006).
[Crossref] [PubMed]

2005 (4)

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, Phys. Rev. A 72, 053807 (2005).
[Crossref]

J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, Opt. Lett. 30, 2581 (2005).
[Crossref] [PubMed]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[Crossref] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. Shlyaptsev, Opt. Lett. 30, 165 (2005).
[Crossref] [PubMed]

2004 (2)

X. Zhang, A. R. Libertun, A. Paul, E. Gagnon, S. Backus, I. P. Christov, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, Opt. Lett. 29, 1357 (2004).
[Crossref] [PubMed]

Ph. Zeitoun, G. Faivre, S. Sebban, T. Mocek, A. Hallou, M. Fajardo, D. Aubert, Ph. Balcou, F. Burgy, D. Douillet, S. Kazamias, G. de Lachèze-Murel, T. Lefrou, S. le Pape, P. Mercère, H. Merdji, A. S. Morlens, J. P. Rousseau, and C. Valentin, Nature 431, 426 (2004).
[Crossref] [PubMed]

2003 (1)

K. A. Janulewicz, A. Lucianetti, G. Priebe, W. Sandner, and P. V. Nickles, Phys. Rev. A 68, 051802 (2003).
[Crossref]

2000 (2)

J. Dunn, Y. Li, A. L. Osterheld, J. Nilsen, J. R. Hunter, and V. N. Shlyaptsev, Phys. Rev. Lett. 84, 4834 (2000).
[Crossref] [PubMed]

P. B. Mirkarimi, S. Bajt, and M. A. Wall, Appl. Opt. 39, 1617 (2000).
[Crossref]

1999 (1)

A. Goltsov, A. Morozov, S. Suckewer, R. Elton, U. Feldman, K. Krushelnick, T. Jones, C. Moore, J. Seely, P. Sprangle, A. Ting, and A. Zigler, IEEE J. Sel. Top. Quantum Electron. 5, 1453 (1999).
[Crossref]

1995 (1)

T. Ditmire, M. H. R. Hutchinson, M. H. Key, C. L. S. Lewis, A. MacPhee, I. Mercer, D. Neely, M. D. Perry, R. A. Smith, J. S. Wark, and M. Zepf, Phys. Rev. A 51, R4337 (1995).
[Crossref] [PubMed]

Appl. Opt. (1)

IEEE J. Sel. Top. Quantum Electron. (1)

A. Goltsov, A. Morozov, S. Suckewer, R. Elton, U. Feldman, K. Krushelnick, T. Jones, C. Moore, J. Seely, P. Sprangle, A. Ting, and A. Zigler, IEEE J. Sel. Top. Quantum Electron. 5, 1453 (1999).
[Crossref]

Nat. Photonics (2)

W. Ackermann, Nat. Photonics 1, 336 (2007).
[Crossref]

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, Nat. Photonics 2, 94 (2008).
[Crossref]

Nature (1)

Ph. Zeitoun, G. Faivre, S. Sebban, T. Mocek, A. Hallou, M. Fajardo, D. Aubert, Ph. Balcou, F. Burgy, D. Douillet, S. Kazamias, G. de Lachèze-Murel, T. Lefrou, S. le Pape, P. Mercère, H. Merdji, A. S. Morlens, J. P. Rousseau, and C. Valentin, Nature 431, 426 (2004).
[Crossref] [PubMed]

Opt. Lett. (5)

Phys. Rev. A (3)

K. A. Janulewicz, A. Lucianetti, G. Priebe, W. Sandner, and P. V. Nickles, Phys. Rev. A 68, 051802 (2003).
[Crossref]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, Phys. Rev. A 72, 053807 (2005).
[Crossref]

T. Ditmire, M. H. R. Hutchinson, M. H. Key, C. L. S. Lewis, A. MacPhee, I. Mercer, D. Neely, M. D. Perry, R. A. Smith, J. S. Wark, and M. Zepf, Phys. Rev. A 51, R4337 (1995).
[Crossref] [PubMed]

Phys. Rev. Lett. (3)

J. Dunn, Y. Li, A. L. Osterheld, J. Nilsen, J. R. Hunter, and V. N. Shlyaptsev, Phys. Rev. Lett. 84, 4834 (2000).
[Crossref] [PubMed]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[Crossref] [PubMed]

Y. Wang, E. Granados, M. A. Larotonda, M. Berrill, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, Phys. Rev. Lett. 97, 123901 (2006).
[Crossref] [PubMed]

Other (1)

D. T. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge U. Press, 1999).

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Figures (4)

Fig. 1
Fig. 1

Spectra of (a) unseeded 13.2 nm Ni-like Cd laser, (b) HH seed pulse, and (c) seeded laser. The Cd plasma amplifier was pumped by a 0.85 J short pulse configured into a 3.5 mm FWHM long line focus.

Fig. 2
Fig. 2

Variation of the intensity of the 13.2 nm amplified seed pulse as a function of the Ni-like Cd amplifier plasma column length.

Fig. 3
Fig. 3

Intensity of the amplified seed pulse as a function of time delay between the peaks of the short pump pulse and the seed pulse at the target position.

Fig. 4
Fig. 4

Degree of coherence μ 12 of the seeded laser beam as a function of slit separation. The slits were placed at 10 cm from the exit of the amplifier. The inset shows a single shot interferogram and corresponding lineout for the 30 μ m slit pair.

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