Abstract

Surface-relief gratings with high spatial frequencies were first fabricated using a direct imprinting process with a glassy carbon mold at the softening temperature of phosphate glass. A grating with maximum height of 730nm and 500nm period was formed on the glass surface by the pressing at the softening temperature of glass under constant pressure of 0.4kNcm2. Phase retardation of 0.1λ was observed between TE-polarized and TM-polarized light at 600nm wavelength.

© 2008 Optical Society of America

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References

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[CrossRef]

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[CrossRef]

T. Yoshikawa, T. Konishi, M. Nakajima, H. Kikuta, H. Kawata, and Y. Hirai, J. Vac. Sci. Technol. B 23, 2939 (2005).
[CrossRef]

2004

2003

Y. Hirai, S. Yoshida, N. Takagi, Y. Tanaka, H. Yabe, K. Sasaki, H. Sumitani, and K. Yamamoto, Jpn. J. Appl. Phys., Part 1 42, 3863 (2003).
[CrossRef]

2002

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H. Toyota, K. Takahara, M. Okano, T. Yotsuya, and H. Kikuta, Jpn. J. Appl. Phys., Part 2 40, L747 (2001).
[CrossRef]

1997

1982

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Appl. Opt.

J. Am. Ceram. Soc.

A. Y. Yi and A. Jain, J. Am. Ceram. Soc. 88, 579 (2005).
[CrossRef]

J. Micromech. Microeng.

A. Y. Yi, Y. Chen, F. Klocke, G. Pongs, A. Demmer, D. Grewell, and A. Benatar, J. Micromech. Microeng. 16, 2000 (2006).
[CrossRef]

J. Vac. Sci. Technol. B

T. Yoshikawa, T. Konishi, M. Nakajima, H. Kikuta, H. Kawata, and Y. Hirai, J. Vac. Sci. Technol. B 23, 2939 (2005).
[CrossRef]

Jpn. J. Appl. Phys., Part 1

Y. Hirai, S. Yoshida, N. Takagi, Y. Tanaka, H. Yabe, K. Sasaki, H. Sumitani, and K. Yamamoto, Jpn. J. Appl. Phys., Part 1 42, 3863 (2003).
[CrossRef]

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[CrossRef]

Opt. Acta

S. J. Wilson and M. C. Hutley, Opt. Acta 29, 993 (1982).
[CrossRef]

Rev. Sci. Instrum.

G. C. Firestone, A. Jain, and A. Y. Yi, Rev. Sci. Instrum. 76, 63010 (2005).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

SEM photographs of a GC mold with four periodic structures of 500 nm pitch and 750 nm groove depth. The groove widths are (a) 150, (b) 220, (c) 290, and (d) 330 nm . The area of each pattern is 0.6 mm × 0.9 mm .

Fig. 2
Fig. 2

SEM photographs of surface-relief gratings imprinted upon the phosphate glass. Gratings (a)–(d) correspond to molds (a)–(d) in Fig. 1.

Fig. 3
Fig. 3

Relationship between the filling factor and the height of each periodic structure. The filling factor was determined as the ratio of the linewidth to the pitch of each grating.

Fig. 4
Fig. 4

SEM photographs of (a) GC mold with a periodic patterned area of 6 mm × 6 mm in the center region, and (b) surface-relief gratings imprinted upon the phosphate glass.

Fig. 5
Fig. 5

Relationship between wavelength and phase retardation between TE-polarized and TM-polarized beams transmitted through the fabricated grating.

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