Abstract

An algorithm designed for digital color holography is presented. It is based on a filter bank allowing full object reconstruction with a pixel pitch being invariant along each wavelength. Its application to high-resolution simultaneous two-wavelength metrology is described.

© 2008 Optical Society of America

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References

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2007

2006

2004

P. Picart, B. Diouf, E. Lolive, and J.-M. Berthelot, Opt. Eng. 43, 1169 (2004).
[CrossRef]

2003

2002

1994

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Figures (5)

Fig. 1
Fig. 1

Experimental setup. PBS1, PBS2, polarizing beam splitters; SF1, SF2, spatial filters.

Fig. 2
Fig. 2

Reconstructed object with the channel and the filter bank.

Fig. 3
Fig. 3

Reconstructed object with the channel and the filter bank.

Fig. 4
Fig. 4

Out-of-plane displacement of the wafer ( u z ) .

Fig. 5
Fig. 5

In-plane displacement of the wafer ( u x ) .

Equations (2)

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U ( X , Y , z + d R ) = j d R λ + + U ( x , y , z ) exp [ 2 j π λ d R 2 + ( X x ) 2 + ( Y y ) 2 ] d R 2 + ( X x ) 2 + ( Y y ) 2 d x d y ,
h ( x , y , d R ) = j d R λ exp 2 j π λ d R 2 + x 2 + y 2 d R 2 + x 2 + y 2 .

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