Abstract

An infrared (IR) polarizer with tungsten silicide (WSi) wire grid was fabricated by two-beam interference exposure and reactive ion etching. To enhance TM transmittance, silicon monoxide was deposited between the WSi wire grid (400nm period) and a Si substrate. The transmittance was over 80% in the 45μm wavelength range. The ratio of TM and TE transmittances was over 100 (20dB) in the 2.56μm wavelength range. The fabricated polarizer has higher durability and bettter compatibility with microfabrication processes compared with conventional IR polarizers.

© 2008 Optical Society of America

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References

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    [CrossRef]

2006 (1)

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

2003 (1)

H. Kikuta, H. Toyota, and W. Yu, Opt. Rev. 10, 63 (2003).
[CrossRef]

1999 (1)

1967 (1)

1960 (1)

Appl. Opt. (1)

Appl. Phys. Lett. (1)

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Opt. Rev. (1)

H. Kikuta, H. Toyota, and W. Yu, Opt. Rev. 10, 63 (2003).
[CrossRef]

Other (4)

S. P. Murarka, Silicides for VLSI Application (Academic, 1986).

E. Hecht, Optics (Addison-Wesley, 1998).

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1998).

H. MacLeod, Thin-Film Optical Filters (Adam Hilger, 1985).

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Figures (5)

Fig. 1
Fig. 1

(a) Thickness dependence of WSi film transmittance (○). The numerals beside the curves denote the complex refractive indices assumed in calculation. (b) Evaluated indices ( n , κ ) of the WSi film. The thin lines show the indices of Si and W [7].

Fig. 2
Fig. 2

Cross-sectional structures of the wire grid with (a) underlaid and (b) covered SiO film.

Fig. 3
Fig. 3

Fabrication process of the wire-grid polarizer.

Fig. 4
Fig. 4

Scanning electron microscope photograph of the wire grid.

Fig. 5
Fig. 5

Transmission spectra of the original substrate, the SiO-coated substrate, and the wire-grid polarizer (TE and TM polarizations).

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