Abstract

A novel non-null interferometer for the precise measurement of aspheric surfaces is presented. In contrast to a classical interferometer, where only one test wavefront is used, the proposed system makes use of multiple test beams propagating under different angles through the interferometer. This allows the measurement of aspheric surfaces in a very short time, even for strong aspheres with deviations from the best-fit sphere of up to 900μm. The non-null test configuration implies that any additional aberrations introduced by the interferometer have to be well characterized to precisely measure the asphere. Experimental measurements of a calibrated non-null interferometer on an aspheric element with 900μm SAG deviation are presented.

© 2008 Optical Society of America

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2007

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

2006

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

2004

2001

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

1993

M. Melozzi, L. Pezzati, and A. Mazzoni, Opt. Eng. (Bellingham) 32, 1073 (1993).
[CrossRef]

1988

1987

1971

DeVries, G.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

Fleig, J.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

Forbes, G.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

Gappinger, R. O.

Garbusi, E.

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

J. Liesener, E. Garbusi, C. Pruss, and W. Osten, “Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberflaeche,” patent pending, Deutsches Patent und Markenamt: 10 2006 057 606.3.

Greivenkamp, J. E.

Hofbauer, U.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

Koliopoulos, C.

Kuechel, M.

M. Kuechel, in Optical Fabrication and Testing (Optical Society of America, 2006), Paper OFTuB5.

Lawrence, G.

Liesener, J.

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

J. Liesener, “Zum Einsatz Räumlicher Lichtmodulatoren in der interferometrischen Wellenfromtmesstechnik,” Ph.D. dissertation (Universität Stuttgart, 2006).

J. Liesener, E. Garbusi, C. Pruss, and W. Osten, “Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberflaeche,” patent pending, Deutsches Patent und Markenamt: 10 2006 057 606.3.

Liu, Y.

MacGovern, A. J.

Mazzoni, A.

M. Melozzi, L. Pezzati, and A. Mazzoni, Opt. Eng. (Bellingham) 32, 1073 (1993).
[CrossRef]

Melozzi, M.

M. Melozzi, L. Pezzati, and A. Mazzoni, Opt. Eng. (Bellingham) 32, 1073 (1993).
[CrossRef]

Miladinovic, D.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

Murphy, P.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

O'Donohue, S.

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

Osten, W.

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

J. Liesener, E. Garbusi, C. Pruss, and W. Osten, “Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberflaeche,” patent pending, Deutsches Patent und Markenamt: 10 2006 057 606.3.

Pezzati, L.

M. Melozzi, L. Pezzati, and A. Mazzoni, Opt. Eng. (Bellingham) 32, 1073 (1993).
[CrossRef]

Pruss, C.

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

J. Liesener, E. Garbusi, C. Pruss, and W. Osten, “Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberflaeche,” patent pending, Deutsches Patent und Markenamt: 10 2006 057 606.3.

Reichelt, S.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

Rocktaeschel, M.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

Tiziani, H. J.

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

Wyant, J. C.

Appl. Opt.

Opt. Eng. (Bellingham)

M. Melozzi, L. Pezzati, and A. Mazzoni, Opt. Eng. (Bellingham) 32, 1073 (1993).
[CrossRef]

Proc. SPIE

P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, Proc. SPIE 6293, 62930J (2006).
[CrossRef]

H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktaeschel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[CrossRef]

E. Garbusi, C. Pruss, J. Liesener, and W. Osten, Proc. SPIE 6616, 661629 (2007).
[CrossRef]

Other

J. Liesener, E. Garbusi, C. Pruss, and W. Osten, “Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberflaeche,” patent pending, Deutsches Patent und Markenamt: 10 2006 057 606.3.

M. Kuechel, in Optical Fabrication and Testing (Optical Society of America, 2006), Paper OFTuB5.

J. Liesener, “Zum Einsatz Räumlicher Lichtmodulatoren in der interferometrischen Wellenfromtmesstechnik,” Ph.D. dissertation (Universität Stuttgart, 2006).

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Figures (4)

Fig. 1
Fig. 1

Experimental setup: L, HeNe laser; SF, spatial filter and beam expander; M 1 and M 2 , mirrors for the reference wave; PZT, piezoelectric transducer; L 1 , focusing of the reference wave on the aperture B; BS 1 and BS 2 , beam splitters; PSA, point source array; MA, microlens array; PA, pinhole array; M, source selection mask; L 2 , test wave collimation optics; O, transmission sphere; T, test surface; B, interferometer aperture; L 3 , imaging lens; E 1 , plane corresponding to the vertex of the test element; E 2 , position of the camera; C, conjugate plane of E 1 .

Fig. 2
Fig. 2

Measurement sequence. Left, movement of the selection mask over the source array in x and y directions. The sources indicated with white are active sources. Right, interferogram sequence as seen on the camera. The interferograms correspond to the active sources shown on the left.

Fig. 3
Fig. 3

Measured aspheric surface. (a) The deviation from the best-fit sphere amounts to approximately 900 μ m and its deviation from the design form up to 1 μ m (b). The measured sections are the unmasked ones.

Fig. 4
Fig. 4

Experimental results. (a) The remaining error after calculation of the surface profile from the measurements amounts to approximately 0.13 λ (PV). Some numerical artifacts that result from the optimization process can still be observed in the phase map. (b) Cut A A of the two-dimensional map shown in (a). In both plots only the rotationally symmetrical components of the measurement are shown.

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