Abstract

We report on a metallization scheme of high reflectance, low resistance, and smooth surface morphology ohmic contact on p-type GaN. Ag–Cu alloy/Ru contact showed low contact resistivity as low as 6.2×106Ωcm2 and high reflectance of 91% at 460nm after annealing at 400°C in air ambient. The oxidation annealing promoted the out-diffusion of Ga atoms to dissolve in an Ag–Cu layer with the formation of an Ag–Ga solid solution, lowering the contact resistivity. The Ru overlayer acts as a diffusion barrier for excessive oxygen incorporation during oxidation annealing, resulting in high reflectance, good thermal stability, and smooth surface quality of the contact.

© 2008 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Highly reliable Ag/Zn/Ag ohmic reflector for high-power GaN-based vertical light-emitting diode

Woong-Sun Yum, Joon-Woo Jeon, Jun-Suk Sung, and Tae-Yeon Seong
Opt. Express 20(17) 19194-19199 (2012)

Highly reliable Ti-based ohmic contact to N-polar n-type GaN for vertical-geometry light-emitting diodes by using a Ta barrier layer

Jae-Seong Park, Jaecheon Han, and Tae-Yeon Seong
Opt. Express 22(S3) A759-A764 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription