Abstract

We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90°, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064nm was demonstrated with attenuation values of 0.9dBcm.

© 2008 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
    [CrossRef]
  2. P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
    [CrossRef] [PubMed]
  3. E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
    [CrossRef]
  4. L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
    [CrossRef]
  5. M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
    [CrossRef]
  6. J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
    [CrossRef]
  7. P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
    [CrossRef]
  8. J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
    [CrossRef]
  9. S. Chang, C. Tsai, Y. Lin, J. Liu, and W. Wang, J. Lightwave Technol. 17, 843 (1999).
    [CrossRef]
  10. R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
    [CrossRef]
  11. H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
    [CrossRef]
  12. D. Hines and K. Williams, J. Vac. Sci. Technol. A 20, 1072 (2002).
    [CrossRef]
  13. W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
    [CrossRef]
  14. W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
    [CrossRef]
  15. H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
    [CrossRef]
  16. Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
    [CrossRef]
  17. P. Rabiei and W. Steier, Appl. Phys. Lett. 86, 161115 (2005).
    [CrossRef]
  18. K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
    [CrossRef] [PubMed]
  19. T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
    [CrossRef]
  20. M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
    [CrossRef]
  21. F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
    [CrossRef]
  22. F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).
  23. K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
    [CrossRef]
  24. T. Volk, V. Pryalkin, and N. Rubinina, Opt. Lett. 15, 996 (1990).
    [CrossRef] [PubMed]
  25. F. Schiller, B. Herreros, and G. Lifante, J. Opt. Soc. Am. A 14, 425 (1997).
    [CrossRef]
  26. T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
    [CrossRef]
  27. C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).
  28. C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

2008 (2)

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

2007 (2)

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

2006 (3)

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

2005 (4)

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

P. Rabiei and W. Steier, Appl. Phys. Lett. 86, 161115 (2005).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

2003 (1)

2002 (2)

D. Hines and K. Williams, J. Vac. Sci. Technol. A 20, 1072 (2002).
[CrossRef]

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

2000 (1)

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

1999 (2)

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

S. Chang, C. Tsai, Y. Lin, J. Liu, and W. Wang, J. Lightwave Technol. 17, 843 (1999).
[CrossRef]

1997 (3)

F. Schiller, B. Herreros, and G. Lifante, J. Opt. Soc. Am. A 14, 425 (1997).
[CrossRef]

R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
[CrossRef]

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

1994 (1)

M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
[CrossRef]

1991 (1)

L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
[CrossRef]

1990 (1)

1987 (1)

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

1985 (1)

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

1979 (1)

M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
[CrossRef]

1964 (1)

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Asobe, M.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Bachmann, T.

M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
[CrossRef]

Bond, W.

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Boyd, G.

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Briggs, T.

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Brown, P.

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

Bryan, D.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Burghoff, J.

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

Burns, W.

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Chandler, P.

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
[CrossRef]

Chang, S.

Cheng, R.

R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
[CrossRef]

Dubs, C.

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

Eason, R.

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

Elam, W.

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Fuchs, H.-J.

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

Fukuda, T.

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Gerson, R.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Gischkat, T.

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Halliburton, L.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Hartung, H.

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Heard, P.

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

Hermann, H.

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

Herreros, B.

Hines, D.

D. Hines and K. Williams, J. Vac. Sci. Technol. A 20, 1072 (2002).
[CrossRef]

Hirata, S.

M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
[CrossRef]

Hu, H.

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

Imaeda, M.

K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
[CrossRef] [PubMed]

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Isshiki, M.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

Kawabe, M.

M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
[CrossRef]

Kawaguchi, T.

K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
[CrossRef] [PubMed]

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Kim, W.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

Kley, E.

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Kräußlich, J.

C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

Lee, H.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

Lifante, G.

Lim, J.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

Lin, Y.

Liu, J.

Lorenz, A.

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

Magari, K.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Mailis, S.

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

Marshall, J.

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

Milenin, A.

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

Miller, R.

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Mizuuchi, K.

K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
[CrossRef] [PubMed]

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Namba, S.

M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
[CrossRef]

Nassau, K.

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Nishida, Y.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Nolte, S.

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

Olivares, J.

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

Park, W.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

Pryalkin, V.

Rabiei, P.

P. Rabiei and W. Steier, Appl. Phys. Lett. 86, 161115 (2005).
[CrossRef]

Rams, J.

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

Ren, Z.

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

Rice, R.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Ricken, R.

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

Robertson, E.

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

Rottschalk, M.

M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
[CrossRef]

Rubinina, N.

Ruske, J.-P.

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

Savage, A.

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

Schiller, F.

Schrempel, F.

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Skeath, P.

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Sohler, W.

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

Steier, W.

P. Rabiei and W. Steier, Appl. Phys. Lett. 86, 161115 (2005).
[CrossRef]

Steinberg, S.

M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
[CrossRef]

Stevie, F.

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Sugita, T.

Suzuki, H.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Sweeney, K.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Tadanaga, O.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Thomas, P.

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

Tomaschke, H.

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Townsend, P.

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
[CrossRef]

Tsai, C.

Tünnermann, A.

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

Umeki, T.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Volk, T.

Wang, T.

R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
[CrossRef]

Wang, W.

S. Chang, C. Tsai, Y. Lin, J. Liu, and W. Wang, J. Lightwave Technol. 17, 843 (1999).
[CrossRef]

R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
[CrossRef]

Wehrspohn, R.

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

Wesch, W.

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Williams, K.

D. Hines and K. Williams, J. Vac. Sci. Technol. A 20, 1072 (2002).
[CrossRef]

Yamamoto, K.

K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
[CrossRef] [PubMed]

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Yanagawa, T.

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

Yang, W.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

Yokoo, Y.

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

Yoon, D.

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

Yoshino, T.

K. Mizuuchi, T. Sugita, K. Yamamoto, T. Kawaguchi, T. Yoshino, and M. Imaeda, Opt. Lett. 28, 1344 (2003).
[CrossRef] [PubMed]

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

Yu, S.

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

Zergioti, I.

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

Zhang, L.

L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
[CrossRef]

Appl. Phys. A (1)

J. Burghoff, H. Hartung, S. Nolte, and A. Tünnermann, Appl. Phys. A 86, 165 (2007).
[CrossRef]

Appl. Phys. Lett. (3)

G. Boyd, R. Miller, K. Nassau, W. Bond, and A. Savage, Appl. Phys. Lett. 5, 234 (1964).
[CrossRef]

E. Robertson, R. Eason, Y. Yokoo, and P. Chandler, Appl. Phys. Lett. 70, 2094 (1997).
[CrossRef]

P. Rabiei and W. Steier, Appl. Phys. Lett. 86, 161115 (2005).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

T. Umeki, M. Asobe, Y. Nishida, O. Tadanaga, K. Magari, T. Yanagawa, and H. Suzuki, IEEE Photon. Technol. Lett. 20, 15 (2008).
[CrossRef]

H. Hu, R. Ricken, W. Sohler, and R. Wehrspohn, IEEE Photon. Technol. Lett. 19, 417 (2007).
[CrossRef]

IEEE Trans. Circuits Syst. (1)

M. Kawabe, S. Hirata, and S. Namba, IEEE Trans. Circuits Syst. 26, 1109 (1979).
[CrossRef]

J. Appl. Phys. (4)

L. Zhang, P. Chandler, and P. Townsend, J. Appl. Phys. 70, 1185 (1991).
[CrossRef]

J. Rams, J. Olivares, P. Chandler, and P. Townsend, J. Appl. Phys. 87, 3199 (2000).
[CrossRef]

K. Sweeney, L. Halliburton, D. Bryan, R. Rice, R. Gerson, and H. Tomaschke, J. Appl. Phys. 57, 1036 (1985).
[CrossRef]

Z. Ren, P. Heard, J. Marshall, P. Thomas, and S. Yu, J. Appl. Phys. 103, 034109 (2008).
[CrossRef]

J. Cryst. Growth (1)

T. Kawaguchi, K. Mizuuchi, T. Yoshino, M. Imaeda, K. Yamamoto, and T. Fukuda, J. Cryst. Growth 203, 173 (1999).
[CrossRef]

J. Lightwave Technol. (2)

S. Chang, C. Tsai, Y. Lin, J. Liu, and W. Wang, J. Lightwave Technol. 17, 843 (1999).
[CrossRef]

R. Cheng, T. Wang, and W. Wang, J. Lightwave Technol. 15, 1880 (1997).
[CrossRef]

J. Opt. Soc. Am. A (1)

J. Vac. Sci. Technol. A (2)

H. Hu, A. Milenin, R. Wehrspohn, H. Hermann, and W. Sohler, J. Vac. Sci. Technol. A 24, 1012 (2006).
[CrossRef]

D. Hines and K. Williams, J. Vac. Sci. Technol. A 20, 1072 (2002).
[CrossRef]

Mater. Res. Soc. Symp. Proc. (1)

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Mater. Res. Soc. Symp. Proc. 908E, 0908-OO16-01.1 (2005).

Nucl. Instrum. Methods Phys. Res. B (1)

F. Schrempel, T. Gischkat, H. Hartung, E. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
[CrossRef]

Opt. Commun. (1)

M. Rottschalk, T. Bachmann, and S. Steinberg, Opt. Commun. 106, 187 (1994).
[CrossRef]

Opt. Lett. (2)

Opt. Mater. (3)

P. Brown, S. Mailis, I. Zergioti, and R. Eason, Opt. Mater. 20, 125 (2002).
[CrossRef]

W. Park, W. Yang, W. Kim, H. Lee, J. Lim, M. Isshiki, and D. Yoon, Opt. Mater. 28, 216 (2006).
[CrossRef]

W. Yang, H. Lee, W. Kim, and D. Yoon, Opt. Mater. 27, 1642 (2005).
[CrossRef]

Phys. Rev. Lett. (1)

P. Skeath, W. Elam, W. Burns, F. Stevie, and T. Briggs, Phys. Rev. Lett. 59, 1950 (1987).
[CrossRef] [PubMed]

Z. Kristallogr. (1)

C. Dubs, A. Lorenz, J.-P. Ruske, H.-J. Fuchs, and A. Tünnermann, Z. Kristallogr. 22, 52 (2005).

Other (1)

C. Dubs, J.-P. Ruske, J. Kräußlich, and A. Tünnermann, “Rib waveguides based on epitaxially grown Zn-subsitituted LiNbO3 LPE films” (to be submitted to Opt Mater.).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

Fabrication process of the waveguides in a zinc-substituted lithium niobate layer.

Fig. 2
Fig. 2

SEM picture of the end facet of the waveguides; the side-wall angle was almost 90°, and the image indicates a low side-wall roughness.

Fig. 3
Fig. 3

(a) Geometry, (b) measured, and (c) simulated mode profile of the fabricated waveguide at a wavelength of 1064 nm (assuming Δ n 0 = 0.006 ), TE polarization.

Tables (1)

Tables Icon

Table 1 Attenuation Values and Mode Width for Varying Waveguide Width a

Metrics