Abstract

We describe the fabrication of a Mach–Zehnder optical modulator in LiNbO3 by femtosecond laser micromachining, which is composed of optical waveguides inscripted by a femtosecond laser and embedded microelectrodes subsequently fabricated using femtosecond laser ablation and selective electroless plating. A half-wave voltage close to 19V is achieved at a wavelength of 632.8nm with an interaction length of 2.6mm. This simple and cost-effective technique opens up new opportunities for fabricating integrated electro-optic devices.

© 2008 Optical Society of America

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