Abstract

We demonstrate postprocessed microfluidic double-heterostructure cavities in silicon-based photonic crystal slab waveguides. The cavity structure is realized by selective fluid infiltration of air holes using a glass microtip, resulting in a local change of the average refractive index of the photonic crystal. The microcavities are probed by evanescent coupling from a silica nanowire. An intrinsic quality factor of 57,000 has been derived from our measurements, representing what we believe to be the largest value observed in microfluidic photonic crystal cavities to date.

© 2008 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
    [CrossRef]
  2. S. John, Phys. Rev. Lett. 58, 2486 (1987).
    [CrossRef] [PubMed]
  3. T. Asano, B. S. Song, and S. Noda, Opt. Express 14, 1996 (2006).
    [CrossRef] [PubMed]
  4. K. Busch and S. John, Phys. Rev. Lett. 83, 967 (1999).
    [CrossRef]
  5. K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
    [CrossRef]
  6. E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, and G. Girolami, Opt. Lett. 29, 1093 (2004).
    [CrossRef] [PubMed]
  7. S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
    [CrossRef]
  8. M. Loncar, A. Scherer, and Y. M. Qiu, Appl. Phys. Lett. 82, 4648 (2003).
    [CrossRef]
  9. S. F. Mingaleev, M. Schillinger, D. Hermann, and K. Busch, Opt. Lett. 29, 2858 (2004).
    [CrossRef]
  10. H. Takeda and K. Yoshino, Phys. Rev. B 67, 073106 (2003).
    [CrossRef]
  11. S. Tomljenovic-Hanic, C. M. de Sterke, and M. J. Steel, Opt. Express 14, 12451 (2006).
    [CrossRef] [PubMed]
  12. F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
    [CrossRef]
  13. C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
    [CrossRef]
  14. D. Erickson, T. Rockwood, T. Emery, A. Scherer, and D. Psaltis, Opt. Lett. 31, 59 (2006).
    [CrossRef] [PubMed]
  15. B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
    [CrossRef]
  16. J. Li, T. P. White, L. O'Faolain, A. Gomez-Iglesias, and T. F. Krauss, Opt. Express 16, 6227 (2008).
    [CrossRef] [PubMed]
  17. C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
    [CrossRef] [PubMed]
  18. N. Mortensen, S. Xiao, and J. Pedersen, Microfluid. Nanofluid. 4, 117 (2008).
    [CrossRef]

2008

2007

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

2006

2005

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

2004

2003

M. Loncar, A. Scherer, and Y. M. Qiu, Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

H. Takeda and K. Yoshino, Phys. Rev. B 67, 073106 (2003).
[CrossRef]

2000

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

1999

K. Busch and S. John, Phys. Rev. Lett. 83, 967 (1999).
[CrossRef]

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

1987

S. John, Phys. Rev. Lett. 58, 2486 (1987).
[CrossRef] [PubMed]

Akahane, Y.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Asano, T.

T. Asano, B. S. Song, and S. Noda, Opt. Express 14, 1996 (2006).
[CrossRef] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Bettotti, P.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Birner, A.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Bog, U.

Busch, K.

S. F. Mingaleev, M. Schillinger, D. Hermann, and K. Busch, Opt. Lett. 29, 2858 (2004).
[CrossRef]

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

K. Busch and S. John, Phys. Rev. Lett. 83, 967 (1999).
[CrossRef]

K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
[CrossRef]

Chow, E.

Colocci, M.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

de Sterke, C. M.

Eggleton, B. J.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Emery, T.

Erickson, D.

Föll, H.

K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
[CrossRef]

Freeman, D.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Giessen, H.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Girolami, G.

Gomez-Iglesias, A.

Gösele, U.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Grillet, C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Grot, A.

Hermann, D.

Intonti, F.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

John, S.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

K. Busch and S. John, Phys. Rev. Lett. 83, 967 (1999).
[CrossRef]

S. John, Phys. Rev. Lett. 58, 2486 (1987).
[CrossRef] [PubMed]

Karnutsch, C.

Kawagishi, Y.

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

Krauss, T. F.

Lee, M. W.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Lee, Y.-H.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Lehmann, V.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Leonard, S. W.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Li, J.

Lölkes, S.

K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
[CrossRef]

Loncar, M.

M. Loncar, A. Scherer, and Y. M. Qiu, Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

Luther-Davies, B.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Madden, S.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

McPhedran, R. C.

Mingaleev, S. F.

Mirkarimi, L. W.

Monat, C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Mondia, J. P.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Mortensen, N.

N. Mortensen, S. Xiao, and J. Pedersen, Microfluid. Nanofluid. 4, 117 (2008).
[CrossRef]

Nakayama, K.

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

Noda, S.

T. Asano, B. S. Song, and S. Noda, Opt. Express 14, 1996 (2006).
[CrossRef] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

O'Faolain, L.

Ozaki, M.

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

Pavesi, L.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Pedersen, J.

N. Mortensen, S. Xiao, and J. Pedersen, Microfluid. Nanofluid. 4, 117 (2008).
[CrossRef]

Psaltis, D.

Qiu, Y. M.

M. Loncar, A. Scherer, and Y. M. Qiu, Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

Rockwood, T.

Ruan, Y.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Scherer, A.

Schillinger, M.

Schweizer, S. L.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Shimoda, Y.

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

Sigalas, M.

Smith, C. L. C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Song, B. S.

T. Asano, B. S. Song, and S. Noda, Opt. Express 14, 1996 (2006).
[CrossRef] [PubMed]

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Steel, M. J.

Takeda, H.

H. Takeda and K. Yoshino, Phys. Rev. B 67, 073106 (2003).
[CrossRef]

Toader, O.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Tomljenovic-Hanic, S.

Turck, V.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

van Driel, H. M.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Vignolini, S.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Wehrspohn, R.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Wehrspohn, R. B.

K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
[CrossRef]

White, T. P.

Wiersma, D.

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Wu, D. K. C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O'Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Xiao, S.

N. Mortensen, S. Xiao, and J. Pedersen, Microfluid. Nanofluid. 4, 117 (2008).
[CrossRef]

Yoshino, K.

H. Takeda and K. Yoshino, Phys. Rev. B 67, 073106 (2003).
[CrossRef]

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

Appl. Phys. Lett.

K. Yoshino, Y. Shimoda, Y. Kawagishi, K. Nakayama, and M. Ozaki, Appl. Phys. Lett. 75, 932 (1999).
[CrossRef]

M. Loncar, A. Scherer, and Y. M. Qiu, Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

F. Intonti, S. Vignolini, V. Turck, M. Colocci, P. Bettotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, Appl. Phys. Lett. 91, 121103 (2007).
[CrossRef]

Microfluid. Nanofluid.

N. Mortensen, S. Xiao, and J. Pedersen, Microfluid. Nanofluid. 4, 117 (2008).
[CrossRef]

Nat. Mater.

B. S. Song, S. Noda, T. Asano, and Y. Akahane, Nat. Mater. 4, 207 (2005).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. B

H. Takeda and K. Yoshino, Phys. Rev. B 67, 073106 (2003).
[CrossRef]

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gösele, and V. Lehmann, Phys. Rev. B 61, R2389 (2000).
[CrossRef]

Phys. Rev. Lett.

S. John, Phys. Rev. Lett. 58, 2486 (1987).
[CrossRef] [PubMed]

K. Busch and S. John, Phys. Rev. Lett. 83, 967 (1999).
[CrossRef]

Other

K. Busch, S. Lölkes, R. B. Wehrspohn, and H. Föll, Photonic Crystals-Advances in Design, Fabrication, and Characterization (Wiley-VCH, 2004).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Schematic showing the fluid infiltration process. A glass microtip that has been immersed into a fluid is drawn across a PhC waveguide, creating a microfluidic DH cavity.

Fig. 2
Fig. 2

(a) Microscope picture ( 150 × magnification) showing a microfluidic DH cavity of 3.3 μ m in width. The infiltration area appears as the region where the contrast between the holes and the PhC matrix is reduced. (b) Calculated dispersion relation of the fundamental mode of a W0.9 PhC waveguide, which is either uninfiltrated (rectangles) or infiltrated with a liquid of n liquid = 1.5 (filled circles). The line represents the dispersion curve of the silica nanowire used for evanescent coupling.

Fig. 3
Fig. 3

Transmission spectrum while probing a microfluidic DH cavity of 3.3 μ m in width. The rightmost cavity mode (4) exhibits a measured Q-factor of Q M = 36,300 .

Fig. 4
Fig. 4

Transmission spectrum while probing a 16 μ m cavity. The measured Q-factors for the cavity modes (5) and (6) are Q M = 45,740 and Q M = 52,050 . Inset, close-up view of resonance (6).

Metrics