Abstract

We present the design, fabrication, and measurement of an ultracompact directional coupler in InPInGaAsPInP. By utilizing the lag effect in the dry etching process, in one etch step, deeply etched asymmetric waveguides with a shallow groove in between are fabricated. This special property enhances the coupling efficiency for the directional coupler and thus makes the device ultracompact. We demonstrate directional couplers as short as 55μm, which is only 130th the length of the conventional design.

© 2008 Optical Society of America

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