Abstract

We report the optical characterization of a metal wiregrid micropolarizer array for IR imaging polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 μm band with a specially designed thin SiO2 layer between the silicon substrate and the wiregrids to improve the performance at the shorter wavelengths. Deep-UV projection lithography is used to fabricate 140-nm-deep wiregrids with a 400 nm period. The extinction ratio and the transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient greater than 70% with an extinction ratio greater than 104 is achieved for the midwave-IR region while maintaining an extinction ratio better than 102 for the near-IR region above 1.5 μm.

© 2008 Optical Society of America

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[CrossRef]

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Akioka, S.

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J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

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[CrossRef]

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Jones, M. W.

Kintaka, K.

Kulp, T. J.

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J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

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J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

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Parrish, M.

Pommet, D. A.

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[CrossRef]

Saito, M.

Sciortino, P.

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

Smith, F. G.

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[CrossRef]

Torok, E. J.

C. S. L. Chun, D. L. Fleming, and E. J. Torok, Proc. SPIE 2234, 275 (1994).
[CrossRef]

Walters, F.

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

Wang, J. J.

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

Yamada, I.

Yamagishi, Y.

Zayhowski, J. J.

Appl. Phys. Lett.

J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006).
[CrossRef]

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

Opt. Lett.

Proc. SPIE

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[CrossRef]

C. S. L. Chun, D. L. Fleming, and E. J. Torok, Proc. SPIE 2234, 275 (1994).
[CrossRef]

Other

E. D. Palik, Handbook of Optical Constants of Solid (Academic, 1998).

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