Abstract

We show that the combination of Bessel beams and photosensitive materials exhibiting polarization filtering properties allows one to reach the smallest mark that can be lithographically generated by focusing systems. This property is of interest in current optical data storage techniques.

© 2007 Optical Society of America

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References

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2006

2005

2003

T. Grosjean, D. Courjon, and D. Van LabekeJ. Microsc. 210, 319 (2003).
[CrossRef] [PubMed]

T. Grosjean and D. Courjon, Phys. Rev. E 67, 46611 (2003).
[CrossRef]

2002

T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
[CrossRef]

2001

L. E. Helseth, Opt. Commun. 191, 161 (2001).
[CrossRef]

2000

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

K. S. Youngworth and T. G. Brown, Opt. Express 7, 77 (2000).
[CrossRef] [PubMed]

1998

1995

Z. Bouchal and M. Olivik, J. Mod. Opt. 42, 1555 (1995).
[CrossRef]

K. Karraï and R. D. Grober, Ultramicroscopy 61, 197 (1995).
[CrossRef]

P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
[CrossRef]

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

1992

G. Scott and N. McArdle, Opt. Eng. 31, 2640 (1992).
[CrossRef]

1991

Bachelot, R.

Baida, F. I.

T. Grosjean, F. I. Baida, and D. Courjon, "Conical optics: the solution of confine light," Appl. Opt. (to be published).
[PubMed]

Batalla, E.

P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
[CrossRef]

Bouchal, Z.

Z. Bouchal and M. Olivik, J. Mod. Opt. 42, 1555 (1995).
[CrossRef]

Bouhelier, A.

Brown, T. G.

Courjon, D.

T. Grosjean and D. Courjon, Opt. Express 14, 2203 (2006).
[CrossRef] [PubMed]

T. Grosjean and D. Courjon, Phys. Rev. E 67, 46611 (2003).
[CrossRef]

T. Grosjean, D. Courjon, and D. Van LabekeJ. Microsc. 210, 319 (2003).
[CrossRef] [PubMed]

T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
[CrossRef]

T. Grosjean and D. Courjon, "Smallest focal spots," Opt. Commun.(to be published).

T. Grosjean, F. I. Baida, and D. Courjon, "Conical optics: the solution of confine light," Appl. Opt. (to be published).
[PubMed]

Descrovi, E.

Gilbert, Y.

Grober, R. D.

K. Karraï and R. D. Grober, Ultramicroscopy 61, 197 (1995).
[CrossRef]

Grosjean, T.

T. Grosjean and D. Courjon, Opt. Express 14, 2203 (2006).
[CrossRef] [PubMed]

T. Grosjean and D. Courjon, Phys. Rev. E 67, 46611 (2003).
[CrossRef]

T. Grosjean, D. Courjon, and D. Van LabekeJ. Microsc. 210, 319 (2003).
[CrossRef] [PubMed]

T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
[CrossRef]

T. Grosjean and D. Courjon, "Smallest focal spots," Opt. Commun.(to be published).

T. Grosjean, F. I. Baida, and D. Courjon, "Conical optics: the solution of confine light," Appl. Opt. (to be published).
[PubMed]

Helseth, L. E.

L. E. Helseth, Opt. Commun. 191, 161 (2001).
[CrossRef]

Herman, R. M.

Herzig, H.-P.

Josse, D.

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

Karraï, K.

K. Karraï and R. D. Grober, Ultramicroscopy 61, 197 (1995).
[CrossRef]

Kim, D. Y.

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

Knoesen, A.

Kumar, J.

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

Li, L.

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

McArdle, N.

G. Scott and N. McArdle, Opt. Eng. 31, 2640 (1992).
[CrossRef]

Milster, T. D.

T. D. Milster, Opt. Photonics News 16(3), 28 (2005).
[CrossRef]

Natansohn, A.

P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
[CrossRef]

Novotny, L.

Olivik, M.

Z. Bouchal and M. Olivik, J. Mod. Opt. 42, 1555 (1995).
[CrossRef]

Paeder, V.

Piron, R.

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

Prêtre, Ph.

Rochon, P.

P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
[CrossRef]

Royer, P.

Scott, G.

G. Scott and N. McArdle, Opt. Eng. 31, 2640 (1992).
[CrossRef]

Spajer, M.

T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
[CrossRef]

Swalen, J. D.

Toussaere, E.

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

Triparthy, S. K.

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

Vaccaro, L.

Van Labeke, D.

T. Grosjean, D. Courjon, and D. Van LabekeJ. Microsc. 210, 319 (2003).
[CrossRef] [PubMed]

Wiederrecht, G. P.

Wiggins, T. A.

Wu, L.-M.

Youngworth, K. S.

Zhan, Q.

Zyss, J.

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

Appl. Opt.

T. Grosjean, F. I. Baida, and D. Courjon, "Conical optics: the solution of confine light," Appl. Opt. (to be published).
[PubMed]

Appl. Phys. Lett.

R. Piron, E. Toussaere, D. Josse, and J. Zyss, Appl. Phys. Lett. 77, 2461 (2000).
[CrossRef]

P. Rochon, E. Batalla, and A. Natansohn, Appl. Phys. Lett. 66, 136 (1995).
[CrossRef]

D. Y. Kim, S. K. Triparthy, L. Li, and J. Kumar, Appl. Phys. Lett. 66, 1166 (1995).
[CrossRef]

J. Microsc.

T. Grosjean, D. Courjon, and D. Van LabekeJ. Microsc. 210, 319 (2003).
[CrossRef] [PubMed]

J. Mod. Opt.

Z. Bouchal and M. Olivik, J. Mod. Opt. 42, 1555 (1995).
[CrossRef]

J. Opt. Soc. Am. A

Opt. Commun.

L. E. Helseth, Opt. Commun. 191, 161 (2001).
[CrossRef]

T. Grosjean and D. Courjon, "Smallest focal spots," Opt. Commun.(to be published).

T. Grosjean, D. Courjon, and M. Spajer, Opt. Commun. 203, 1 (2002).
[CrossRef]

Opt. Eng.

G. Scott and N. McArdle, Opt. Eng. 31, 2640 (1992).
[CrossRef]

Opt. Express

Opt. Lett.

Opt. Photonics News

T. D. Milster, Opt. Photonics News 16(3), 28 (2005).
[CrossRef]

Phys. Rev. E

T. Grosjean and D. Courjon, Phys. Rev. E 67, 46611 (2003).
[CrossRef]

Ultramicroscopy

K. Karraï and R. D. Grober, Ultramicroscopy 61, 197 (1995).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

(a) Intensity of the RPFB at focus (simulation); (b) transverse intenstiy of the RPBB (simulation); (c) surface deformation of the PMMA-DR1 layer (experiments). Image size, 2 μ m × 2 μ m . (d) Profiles of (a) (dotted curve), (b) (dashed curve), (c) (solid curve), and of the smallest mark (dashed-dotted curve, simulation).

Fig. 2
Fig. 2

Topography of the surface modulation produced by a RPBB. The photon dose in (b) is twofold smaller than the one in (a).

Fig. 3
Fig. 3

(a) Intensity of the CPFB at focus (simulation); (b) transverse intensity of the CPBB (simulation); (c) map of the CPBB intensity (experiments). Image size, 2 μ m × 2 μ m . (d) Profiles of (a) (dotted curve), (b) (dashed curve), (c) (solid curve), and of the smallest mark (dashed-dotted curve, simulation).

Equations (1)

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FWHM = 0.36 λ NA .

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