Abstract

Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of 19nm in the center of which exists a narrow transmission band of 0.5nm with a quality factor of 3000. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.

© 2007 Optical Society of America

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