Abstract

Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of 19nm in the center of which exists a narrow transmission band of 0.5nm with a quality factor of 3000. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.

© 2007 Optical Society of America

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References

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  1. H. Kogelnik, in Integrated Optics, Vol. 7 of Topics in Applied Physics, T.Tamir, ed. (Springer-Verlag, 1979), pp. 13-81.
    [CrossRef]
  2. H. A. Haus, Waves and Fields in Optoelectronics (Prentice-Hall, 1984), pp. 235-253.
  3. D. G. Hall, in Progress in Optics, E.Wolf, ed. (North-Holland, 1991), Vol. XXIX, pp. 1-63.
    [CrossRef]
  4. Y. Suematsu and A. R. Adams, Handbook of Semiconductor Lasers and Photonic Integrated Circuits (Chapman & Hall, 1994).
  5. C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
    [CrossRef]
  6. J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
    [CrossRef]
  7. H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
    [CrossRef]
  8. H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
    [CrossRef]
  9. D. Marcuse, Theory of Dielectric Optical Waveguides, 2nd ed. (Academic, 1991), pp. 1-14.
  10. G. P. Agrawal and N. K. Dutta, IEEE J. Quantum Electron. 21, 534 (1985).
    [CrossRef]
  11. Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
    [CrossRef]
  12. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
    [CrossRef]

2003

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

2002

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

2001

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

1989

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

1985

G. P. Agrawal and N. K. Dutta, IEEE J. Quantum Electron. 21, 534 (1985).
[CrossRef]

Ackerman, D. A.

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

Adams, A. R.

Y. Suematsu and A. R. Adams, Handbook of Semiconductor Lasers and Photonic Integrated Circuits (Chapman & Hall, 1994).

Agrawal, G. P.

G. P. Agrawal and N. K. Dutta, IEEE J. Quantum Electron. 21, 534 (1985).
[CrossRef]

Arai, S.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

Chen, B.

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Dutta, N. K.

G. P. Agrawal and N. K. Dutta, IEEE J. Quantum Electron. 21, 534 (1985).
[CrossRef]

Ebihara, K.

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Hall, D. G.

D. G. Hall, in Progress in Optics, E.Wolf, ed. (North-Holland, 1991), Vol. XXIX, pp. 1-63.
[CrossRef]

Hasegawa, T.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

Haus, H. A.

H. A. Haus, Waves and Fields in Optoelectronics (Prentice-Hall, 1984), pp. 235-253.

Henry, C. H.

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Jewell, T. E.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Kanjo, H.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

Kazarinov, R. F.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Kim, H. C.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

Kisler, R. C.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Kistler, R. C.

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

Kogelnik, H.

H. Kogelnik, in Integrated Optics, Vol. 7 of Topics in Applied Physics, T.Tamir, ed. (Springer-Verlag, 1979), pp. 13-81.
[CrossRef]

Marcuse, D.

D. Marcuse, Theory of Dielectric Optical Waveguides, 2nd ed. (Academic, 1991), pp. 1-14.

Matsui, K.

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Morita, H.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Ohta, M.

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Olsson, N. A.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Orlowski, K. J.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Orlowsky, K. J.

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

Pol, V.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Shani, Y.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

Shim, J.-I.

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Suematsu, Y.

Y. Suematsu and A. R. Adams, Handbook of Semiconductor Lasers and Photonic Integrated Circuits (Chapman & Hall, 1994).

Tamura, S.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

Tsuchizawa, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Watanabe, T.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Wiedmann, J.

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

Yamada, K.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Appl. Phys. Lett.

Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, and D. A. Ackerman, Appl. Phys. Lett. 55, 2389 (1989).
[CrossRef]

Electron. Lett.

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

J. Wiedmann, K. Ebihara, H. C. Kim, B. Chen, M. Ohta, K. Matsui, S. Tamura, J.-I. Shim, and S. Arai, Electron. Lett. 37, 831 (2001).
[CrossRef]

IEEE J. Quantum Electron.

G. P. Agrawal and N. K. Dutta, IEEE J. Quantum Electron. 21, 534 (1985).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

H. C. Kim, H. Kanjo, T. Hasegawa, S. Tamura, and S. Arai, IEEE J. Sel. Top. Quantum Electron. 9, 1146 (2003).
[CrossRef]

J. Lightwave Technol.

C. H. Henry, Y. Shani, R. C. Kisler, T. E. Jewell, V. Pol, N. A. Olsson, R. F. Kazarinov, and K. J. Orlowski, J. Lightwave Technol. 7, 1379 (1989).
[CrossRef]

Jpn. J. Appl. Phys.

H. C. Kim, J. Wiedmann, K. Matsui, S. Tamura, and S. Arai, Jpn. J. Appl. Phys. 40, L1107 (2001).
[CrossRef]

Other

D. Marcuse, Theory of Dielectric Optical Waveguides, 2nd ed. (Academic, 1991), pp. 1-14.

H. Kogelnik, in Integrated Optics, Vol. 7 of Topics in Applied Physics, T.Tamir, ed. (Springer-Verlag, 1979), pp. 13-81.
[CrossRef]

H. A. Haus, Waves and Fields in Optoelectronics (Prentice-Hall, 1984), pp. 235-253.

D. G. Hall, in Progress in Optics, E.Wolf, ed. (North-Holland, 1991), Vol. XXIX, pp. 1-63.
[CrossRef]

Y. Suematsu and A. R. Adams, Handbook of Semiconductor Lasers and Photonic Integrated Circuits (Chapman & Hall, 1994).

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Figures (3)

Fig. 1
Fig. 1

Simulated plots of transmitted power from the devices.

Fig. 2
Fig. 2

SEM micrographs of the devices. The insets show magnified views of the rectangles: (a) Transmission resonant filter with vertical gratings. (b) Micrograph of the whole device and its inset showing the waveguide connection defined at two different magnifications. The dotted rectangle shows the area defined at 1000 × magnification.

Fig. 3
Fig. 3

Measured transmission spectra from the fabricated devices designed in Fig. 1 with W S = 500 nm and Λ = 305 nm for (a) Δ W S = 50 nm , 2 × L = 70 μ m and (b) blue curve, Δ W S = 75 nm , 2 × L = 50 μ m ; red curve, Δ W S = 100 nm , 2 × L = 40 μ m .

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

κ = Γ ( π λ Δ W S W e f f n S 2 n 2 n q ) [ n 2 n S 2 n 2 n SiO 2 2 + 1 ] ,
t R F = t 2 exp ( i ϕ ) 1 r 2 exp ( 2 i ϕ ) ,

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