Integrated waveguide Fabry–Perot microcavities with silicon/air Bragg mirrors

Abstract

We demonstrate in-plane microfabricated Fabry–Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit $Q=26963$, $\mathrm{FWHM}=0.060\mathrm{nm}$, finesse $F=489$, free spectral range $\mathrm{FSR}=81.7\mathrm{nm}$, and DBR mirror reflectance $R=99.4\%$. Thermo-optic tuning over $6.7\mathrm{nm}$ is also demonstrated.

© 2007 Optical Society of America

Thermo-optic tuning and switching in SOI waveguide Fabry-Perot microcavities

Marcel W. Pruessner, Todd H. Stievater, Mike S. Ferraro, and William S. Rabinovich
Opt. Express 15(12) 7557-7563 (2007)

Analysis and design of tunable wideband microwave photonics phase shifter based on Fabry–Perot cavity and Bragg mirrors in silicon-on-insulator waveguide

Pengfei Qu, Jingran Zhou, Weiyou Chen, Fumin Li, Haibin Li, Caixia Liu, Shengping Ruan, and Wei Dong
Appl. Opt. 49(12) 2391-2396 (2010)

Weakly modulated silicon-dioxide-cladding gratings for silicon waveguide Fabry-Pérot cavities

Richard R. Grote, Jeffrey B. Driscoll, Claudiu G. Biris, Nicolae C. Panoiu, and Richard M. Osgood
Opt. Express 19(27) 26406-26415 (2011)

Integrated waveguide-DBR microcavity opto-mechanical system

Marcel W. Pruessner, Todd H. Stievater, Jacob B. Khurgin, and William S. Rabinovich
Opt. Express 19(22) 21904-21918 (2011)

Low-loss silica-on-silicon two-dimensional Fabry–Perot cavity based on holographic Bragg reflectors

Christoph M. Greiner, Dmitri Iazikov, and Thomas W. Mossberg
Opt. Lett. 30(1) 38-40 (2005)