Integrated waveguide Fabry–Perot microcavities with silicon/air Bragg mirrors

Abstract

We demonstrate in-plane microfabricated Fabry–Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit $Q=26963$, $\mathrm{FWHM}=0.060\mathrm{nm}$, finesse $F=489$, free spectral range $\mathrm{FSR}=81.7\mathrm{nm}$, and DBR mirror reflectance $R=99.4\%$. Thermo-optic tuning over $6.7\mathrm{nm}$ is also demonstrated.

© 2007 Optical Society of America

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