Abstract
We demonstrate in-plane microfabricated Fabry–Perot cavities with cryogenically etched silicon/air distributed Bragg reflector (DBR) mirrors and integrated silicon-on-insulator rib waveguides. Several DBR configurations and cavity lengths were measured. Various devices exhibit , , finesse , free spectral range , and DBR mirror reflectance . Thermo-optic tuning over is also demonstrated.
© 2007 Optical Society of America
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