Abstract

We have investigated the fabrication of waveguides from alicyclic methacrylate copolymer based on refractive-index modification by deep-UV exposure. By optimizing the UV-exposure process, we were able to obtain single-mode waveguides with a propagation loss of 0.8dBcm at 1550nm, which is due only to material losses in this wavelength range. The loss obtained here is comparable with that of poly(methyl methacrylate) (PMMA) waveguides fabricated by deep-UV exposure. The fabricated waveguide is also single mode at 808nm, and its propagation loss is 0.6dBcm. This alicyclic methacrylate copolymer is a promising material for the fabrication of polymer waveguides by use of deep-UV exposure.

© 2007 Optical Society of America

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