Abstract

We present a quasi-common-path laser feedback interferometer based on frequency shifting and multiplexing. The interferometer uses two acousto-optic modulators to shift the frequency of the target-generated feedback light by 2Ω. A properly aligned mirror is inserted into the feedback path to generate a feedback light frequency shifted by Ω. Phase variations of the two quasi-common-path feedback light beams are simultaneously measured through heterodyne demodulation with two different reference signals. Their subtraction accurately reflects the target displacement. Under typical room conditions, the system's short-period resolution is better than 2nm, and its 3min displacement accuracy is 8nm.

© 2007 Optical Society of America

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2006

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

2005

2004

E. Lacot and O. Hugon, Phys. Rev. A 70, 053824 (2004).
[CrossRef]

2002

2001

1999

E. Lacot, R. Day, and F. Stoeckel, Opt. Lett. 24, 744 (1999).

R. Kawai, Y. Asakawa, and K. Otsuka, IEEE Photon. Technol. Lett. 11, 706 (1999).
[CrossRef]

1998

1993

1963

P. G. R. King and G. J. Steward, New Sci. 17, 180 (1963).

Abe, K.

Andrews, J. H.

Asakawa, Y.

R. Kawai, Y. Asakawa, and K. Otsuka, IEEE Photon. Technol. Lett. 11, 706 (1999).
[CrossRef]

Bearden, A.

Day, R.

Guo, D.

Hugon, O.

E. Lacot and O. Hugon, Phys. Rev. A 70, 053824 (2004).
[CrossRef]

Jiang, X.

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

Kawai, R.

R. Kawai, Y. Asakawa, and K. Otsuka, IEEE Photon. Technol. Lett. 11, 706 (1999).
[CrossRef]

King, P. G. R.

P. G. R. King and G. J. Steward, New Sci. 17, 180 (1963).

Ko, J.-Y.

Lacot, E.

Lim, T.-S.

Lin, D.

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

Liu, Z.

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

Neil, M. P.

Osborne, L. C.

Otsuka, K.

K. Otsuka, K. Abe, J.-Y. Ko, and T.-S. Lim, Opt. Lett. 27, 1339 (2002).

R. Kawai, Y. Asakawa, and K. Otsuka, IEEE Photon. Technol. Lett. 11, 706 (1999).
[CrossRef]

Ovryn, B.

Pinel, J.

Steward, G. J.

P. G. R. King and G. J. Steward, New Sci. 17, 180 (1963).

Stoeckel, F.

Tan, S.

Wang, M.

Yin, C.

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

IEEE Photon. Technol. Lett.

R. Kawai, Y. Asakawa, and K. Otsuka, IEEE Photon. Technol. Lett. 11, 706 (1999).
[CrossRef]

Meas. Sci. Technol.

C. Yin, D. Lin, Z. Liu and X. Jiang, Meas. Sci. Technol. 17, 596 (2006).

New Sci.

P. G. R. King and G. J. Steward, New Sci. 17, 180 (1963).

Opt. Express

Opt. Lett.

Phys. Rev. A

E. Lacot and O. Hugon, Phys. Rev. A 70, 053824 (2004).
[CrossRef]

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