Abstract

We investigated the extraordinary optical transmission phenomenon in the UV range by fabricating large-area, free-standing aluminum hole arrays using extreme UV interference lithography and shadow thermal evaporation. Transmission spectra show strong peaks in the UV region resulting from both surface plasmon polariton and localized surface plasmon excitations. The results indicate that the high plasmon frequency of Al is directly responsible for the presence of strong resonance peaks in the UV region, which supports the role of plasmonic phenomena in the extraordinary transmission. The simple fabrication method enables large-area production of such structures for research and industrial production purposes.

© 2006 Optical Society of America

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2006

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

2005

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

A. Degiron and T. W. Ebbesen, J. Opt. A 7, S90 (2005).
[CrossRef]

F. Marquier, J.-J. Greffet, S. Collin, F. Pardo, and J. L. Pelouard, Opt. Express 13, 70 (2005).
[CrossRef] [PubMed]

2004

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

2003

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

2002

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

1998

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

Barnes, W. L.

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Bohren, C. F.

C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, 1983).

Cerrina, F.

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Collin, S.

David, C.

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Degiron, A.

A. Degiron and T. W. Ebbesen, J. Opt. A 7, S90 (2005).
[CrossRef]

Dereux, A.

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Ebbesen, T. W.

A. Degiron and T. W. Ebbesen, J. Opt. A 7, S90 (2005).
[CrossRef]

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

Garcia-Vidal, F. J.

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

Ghaemi, H. F.

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

Gobrecht, J.

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Greffet, J.-J.

Hanarp, P.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Hibbins, A. P.

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

Hooper, I. R.

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

Huffman, D. R.

C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, 1983).

Käll, M.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Lezec, H. J.

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

Lockyear, M. J.

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

Marquier, F.

Martin-Moreno, L.

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

Moreno, E.

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

Olofsson, L.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Pardo, F.

Pelouard, J. L.

Porto, J. A.

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

Prikulis, J.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Sambles, J. R.

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

Solak, H. H.

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Sutherland, D.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Thio, T.

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

Wang, L.

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Wolff, P. A.

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

J. Opt. A

A. Degiron and T. W. Ebbesen, J. Opt. A 7, S90 (2005).
[CrossRef]

J. Vac. Sci. Technol. B

H. H. Solak, C. David, J. Gobrecht, L. Wang, and F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002).
[CrossRef]

Nano Lett.

J. Prikulis, P. Hanarp, L. Olofsson, D. Sutherland, and M. Käll, Nano Lett. 4, 1003 (2004).
[CrossRef]

Nature

T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature 391, 667 (1998).
[CrossRef]

W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature 424, 824 (2003).
[CrossRef] [PubMed]

Opt. Express

Phys. Rev. Lett.

F. J. Garcia-Vidal, E. Moreno, J. A. Porto, and L. Martin-Moreno, Phys. Rev. Lett. 95, 103901 (2005).
[CrossRef] [PubMed]

A. P. Hibbins, M. J. Lockyear, I. R. Hooper, and J. R. Sambles, Phys. Rev. Lett. 96, 073904 (2006).
[CrossRef] [PubMed]

Other

E.D.Palik, ed., Handbook of Optical Constants of Solids (Academic, 1985).

C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, 1983).

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Figures (4)

Fig. 1
Fig. 1

SEM images of the free-standing Al hole array at (a) top surface, (b) back surface, and (c) back surface viewed at an oblique angle. The hole period is 283 nm , hole width is 150 nm , and the total area of the hole array is 400 × 400 μ m 2 . Al film thickness is 90 nm . Inset, cross section of a hole.

Fig. 2
Fig. 2

Zeroth-order transmission spectra of the free-standing hole array as a function of the incident angle with unpolarized light. For clarity the spectra are plotted with 1% vertical offset. Inset, transmission at 45 ° for s- and p-polarized light.

Fig. 3
Fig. 3

Normal-incidence transmission spectra of Al hole arrays on quartz substrate with changing hole sizes. Al film thickness is 90 nm . For clarity the spectra are plotted with 2% vertical offset.

Fig. 4
Fig. 4

Dispersion curves of the resonant peaks in the transmission spectra of Al hole array extracted from Fig. 2. Large squares denote the high-intensity peaks and small squares indicate the weak peaks in the spectra. Solid lines and curves are the predicted dispersion curves of the surface plasmons of a flat Al–air interface, accompanied with the reciprocal lattice vector with indices of ( i , j ) .

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