Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2nm is demonstrated with a known sample.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Properties of induced polarization evanescent reflection with a solid immersion lens (SIL)

Tao Chen and Tom D. Milster
Opt. Express 15(3) 1191-1204 (2007)

High-density optical recording using a solid immersion lens

Isao Ichimura, Shinichi Hayashi, and G. S. Kino
Appl. Opt. 36(19) 4339-4348 (1997)

Roles of propagating and evanescent waves in solid immersion lens systems

Tom D. Milster, Joshua S. Jo, and Kusato Hirota
Appl. Opt. 38(23) 5046-5057 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription