Abstract

Thermal imprinting of transparent tin phosphate glass was performed at 250°C using a fine-patterned silica mold. The glass sample was prepared by a conventional melt-quenching method and polished with a roughness of 10nm for imprinting experiments. The imprinting temperature is optimized based on experimental viscosity data. Scanning electron microscope and atomic force microscope observations revealed that a square grid pattern has a surface roughness of 10nm and 5μm×5μm squares with 1μm intervals and 90100nm depth. Diffraction spots due to the micropattern are demonstrated by illuminating He–Ne laser light.

© 2007 Optical Society of America

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