Imprinted optical pattern of low-softening phosphate glass

Abstract

Thermal imprinting of transparent tin phosphate glass was performed at $250°\mathrm{C}$ using a fine-patterned silica mold. The glass sample was prepared by a conventional melt-quenching method and polished with a roughness of $⩽10\mathrm{nm}$ for imprinting experiments. The imprinting temperature is optimized based on experimental viscosity data. Scanning electron microscope and atomic force microscope observations revealed that a square grid pattern has a surface roughness of $⩽10\mathrm{nm}$ and $5\mu \mathrm{m}\times 5\mu \mathrm{m}$ squares with $\sim 1\mu \mathrm{m}$ intervals and $90–100\mathrm{nm}$ depth. Diffraction spots due to the micropattern are demonstrated by illuminating He–Ne laser light.

© 2007 Optical Society of America