Abstract

The determinist behavior of the femtosecond ablation process allows morphing features well under the diffraction limit by utilizing the thresholding effect, down to the nanometer scale. Because there are a vast range of applications where scaling down the size of the features is a major concern, we investigate the use of superresolving pupil plane filters. As is well known, these filters redistribute the focused optical intensity for a narrower bright spot and, as a trade-off, increase the sidelobes. However, this drawback can be rendered insignificant if all the outer optical power is kept under the determinist threshold value. Two types of pure absorbing binary filter have been tried, giving credence to a size reduction of the ablations in fused silica.

© 2007 Optical Society of America

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2005 (2)

2003 (2)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

2002 (1)

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

2000 (1)

1999 (1)

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

1998 (1)

T. R. M. Sales, Phys. Rev. Lett. 81, 3844 (1998).
[Crossref]

1997 (1)

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[Crossref]

1996 (1)

1990 (1)

T.Wilson, ed., Confocal Microscopy (Academic, 1990).

1985 (1)

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[Crossref]

1964 (1)

P. Jacquinot and B. Rozien-Dossier, in Progress in Optics, Vol. III, E.Wolf, ed. (North Holland, 1964), pp. 29-186.
[Crossref]

1952 (1)

G. Toraldo di Francia, Nuovo Cimento Suppl. 9, 42 (1952).

Aime, C.

C. Aime, Astron. Astrophys. 434, 785 (2005).
[Crossref]

Andres, P.

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

Boyer, G.

Chimmalgi, A.

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

Choi, T. Y.

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

Feit, M. D.

Fujiwara, S.

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

Glezer, E. N.

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[Crossref]

Grigoropoulos, C. P.

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

Herman, S.

Hirao, K.

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

Hunt, A. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Ibàñez-López, C.

Jacquinot, P.

P. Jacquinot and B. Rozien-Dossier, in Progress in Optics, Vol. III, E.Wolf, ed. (North Holland, 1964), pp. 29-186.
[Crossref]

Joglekar, A. P.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Juskaitis, R.

Komvopoulos, K.

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

Kowalczyk, M.

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

Laczik, Z. J.

Liu, H.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Martinez-Corral, M.

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

Martnez-Corral, M.

Mazur, E.

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[Crossref]

Meyhöfer, E.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Miura, K.

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

Mourou, G.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[Crossref]

Neil, M. A. A.

Perry, M. D.

Qiu, J.

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

Rozien-Dossier, B.

P. Jacquinot and B. Rozien-Dossier, in Progress in Optics, Vol. III, E.Wolf, ed. (North Holland, 1964), pp. 29-186.
[Crossref]

Rubenchik, A. M.

Saavedra, G.

Sakaguchi, S.

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

Sales, T. R. M.

T. R. M. Sales, Phys. Rev. Lett. 81, 3844 (1998).
[Crossref]

Sarafis, V.

Shore, B. W.

Spooner, G. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Strickland, D.

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[Crossref]

Stuart, B. C.

Toraldo di Francia, G.

G. Toraldo di Francia, Nuovo Cimento Suppl. 9, 42 (1952).

Wilson, T.

Zapata-Rodriguez, C. J.

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

Appl. Phys. B (1)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, Appl. Phys. B 77, 25 (2003).
[Crossref]

Appl. Phys. Lett. (3)

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[Crossref]

K. Miura, J. Qiu, S. Fujiwara, S. Sakaguchi, and K. Hirao, Appl. Phys. Lett. 80, 2263 (2002).
[Crossref]

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146 (2003).
[Crossref]

Astron. Astrophys. (1)

C. Aime, Astron. Astrophys. 434, 785 (2005).
[Crossref]

J. Opt. Soc. Am. B (1)

Nuovo Cimento Suppl. (1)

G. Toraldo di Francia, Nuovo Cimento Suppl. 9, 42 (1952).

Opt. Commun. (2)

M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, Opt. Commun. 165, 267 (1999).
[Crossref]

D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
[Crossref]

Opt. Express (1)

Opt. Lett. (1)

Phys. Rev. Lett. (1)

T. R. M. Sales, Phys. Rev. Lett. 81, 3844 (1998).
[Crossref]

Other (2)

P. Jacquinot and B. Rozien-Dossier, in Progress in Optics, Vol. III, E.Wolf, ed. (North Holland, 1964), pp. 29-186.
[Crossref]

T.Wilson, ed., Confocal Microscopy (Academic, 1990).

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Figures (2)

Fig. 1
Fig. 1

Diagram of the experimental setup. The 60 × is a water immersion objective. A drop of water (not shown in the picture) was placed between the objective and target. A three-axis motor is used to find optimal focusing conditions and to translate the target in order to perform single-shot experiments. The laser beam is focused on the back side of the target.

Fig. 2
Fig. 2

SEM images of femtosecond photoablation obtained with an unobstructed pupil objective (above), with a dark-ring pupil (middle), and with an annular pupil (bottom). The inset shows an image of an ablation obtained with the target inclined at 45 ° with respect to the incident electron beam in order to evidence the 3D structure of an ablation.

Tables (1)

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Table 1 Summary of Filter Parameters and Experimental Results

Equations (1)

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I ( ν , u ) = P ( ϱ ) J 0 ( ν ϱ ) exp ( i u ϱ 2 2 ) ϱ d ϱ 2 ,

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