Abstract

We described a highly efficient polarizing beam splitter (PBS) of a deep-etched binary-phase fused-silica grating, where TE- and TM-polarized waves are mainly diffracted in the 1st and 0th orders, respectively. To achieve a high extinction ratio and diffraction efficiency, the grating depth and period are optimized by using rigorous coupled-wave analysis, which can be well explained based on the modal method with effective indices of the modes for TE/TM polarization. Holographic recording technology and inductively coupled plasma etching are employed to fabricate the fused-silica PBS grating. Experimental results of diffraction efficiencies approaching 80% for a TE-polarized wave in the 1st order and more than 85% for a TM-polarized wave in the 0th order were obtained at a wavelength of 1550nm. Because of its compact structure and simple fabrication process, which is suitable for mass reproduction, a deep-etched fused-silica grating as a PBS should be a useful device for practical applications.

© 2007 Optical Society of America

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References

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[CrossRef]

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[CrossRef]

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[CrossRef]

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P. Lalanne, J. Hazart, P. Chavel, E. Cambril, and H. Launois, J. Opt. A, Pure Appl. Opt. 1, 215 (1999).
[CrossRef]

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Lima, C. R. A.

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[CrossRef]

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Muys, P.

Néauport, J.

Pajewski, L.

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Santarsiero, M.

Schettini, G.

Schröter, S.

Sigg, H.

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Appl. Opt. (8)

J. Opt. A, Pure Appl. Opt. (1)

P. Lalanne, J. Hazart, P. Chavel, E. Cambril, and H. Launois, J. Opt. A, Pure Appl. Opt. 1, 215 (1999).
[CrossRef]

J. Opt. Soc. Am. A (2)

Opt. Acta (1)

I. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewartha, Opt. Acta 28, 413 (1981).
[CrossRef]

Opt. Express (2)

Opt. Lett. (5)

Other (1)

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, 1999).

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Figures (5)

Fig. 1
Fig. 1

Schematic of a fused-silica transmission PBS grating: n 1 and n 2 , refractive indices of air and fused silica, respectively; d, grating period; b, linewidth; h, depth; θ i , incident angle; θ 0 and θ 1 , diffraction angles of the 0th and 1 st orders in air, respectively.

Fig. 2
Fig. 2

Logarithm of the extinction ratio of the transmission PBS grating for different profile parameters with a duty cycle of 0.5 at the wavelength of 1550 nm .

Fig. 3
Fig. 3

Diffraction efficiency as a function of incident wavelength in the C + L band under Littrow mounting, period d = 890 nm , duty cycle f = 0.5 , and depth h = 1.99 μ m .

Fig. 4
Fig. 4

Scanning electron micrograph of a fused-silica grating with period 890 nm , depth 2.00 μ m , and duty cycle 0.5 .

Fig. 5
Fig. 5

Diffraction efficiency of the fabricated PBS grating as a function of incident angle at a wavelength of 1550 nm : (a) experiment, (b) theory.

Equations (2)

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C 0 = η 0 T M η 0 T E , C 1 = η 1 T E η 1 T M ,
C = minimum { C 0 , C 1 } .

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