Abstract

We demonstrate a high-throughput, high-damage-threshold beam separator for wavelengths shorter than 30nm, which uses a 10nm thick niobium nitrogen film prepared on a Si substrate, set at the Brewster angle relative to the pump wavelength. The film was deposited by rf reactive magnetron sputtering on a Si substrate. The beam separator has an attenuation ratio of 0.01 and a damage-threshold intensity of at least 0.8TWcm2 for a 26fs pump pulse. The measured reflectivity of the beam separator exceeded 70% in a wavelength range of 1318nm. This broadband beam separator may be used to eliminate energetic laser pulses from longitudinally pumped x ray lasers as well as from high-order harmonics.

© 2006 Optical Society of America

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2005

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

2004

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

E. J. Takahashi, H. Hasegawa, Y. Nabekawa, and K. Midorikawa, Opt. Lett. 29, 507 (2004).
[CrossRef] [PubMed]

E. J. Takahashi, Y. Nabekawa, and K. Midorikawa, Appl. Phys. Lett. 84, 4 (2004).
[CrossRef]

2003

2001

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

1995

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Bucourt, S.

Descanmps, D.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Douillet, D.

Dovillaire, G.

Goldberg, K. A.

Hasegawa, H.

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

E. J. Takahashi, H. Hasegawa, Y. Nabekawa, and K. Midorikawa, Opt. Lett. 29, 507 (2004).
[CrossRef] [PubMed]

Idir, M.

Johansson, A.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Kanai, T.

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

Khanna, S. K.

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Kosuge, A.

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

Kuroda, H.

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

Lamb, J. I.

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Le Pape, S.

Levecq, X.

L'Huilleir, A.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Mauritsson, J.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Mercére, P.

Midorikawa, K.

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

E. J. Takahashi, H. Hasegawa, Y. Nabekawa, and K. Midorikawa, Opt. Lett. 29, 507 (2004).
[CrossRef] [PubMed]

E. J. Takahashi, Y. Nabekawa, and K. Midorikawa, Appl. Phys. Lett. 84, 4 (2004).
[CrossRef]

Nabekawa, Y.

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

E. J. Takahashi, Y. Nabekawa, and K. Midorikawa, Appl. Phys. Lett. 84, 4 (2004).
[CrossRef]

E. J. Takahashi, H. Hasegawa, Y. Nabekawa, and K. Midorikawa, Opt. Lett. 29, 507 (2004).
[CrossRef] [PubMed]

Naulleau, P. P.

Norin, J.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Ozaki, T.

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

Rekawa, S.

Ruxin, Li.

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

Sekikawa, T.

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

Takahashi, E. J.

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

E. J. Takahashi, H. Hasegawa, Y. Nabekawa, and K. Midorikawa, Opt. Lett. 29, 507 (2004).
[CrossRef] [PubMed]

E. J. Takahashi, Y. Nabekawa, and K. Midorikawa, Appl. Phys. Lett. 84, 4 (2004).
[CrossRef]

Thakoor, A. P.

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Thakoor, S.

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Wahlstrom, C. G.

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

Watanabe, S.

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

Yamamoto, K.

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

Zeitoun, P.

Appl. Phys. Lett.

E. J. Takahashi, Y. Nabekawa, and K. Midorikawa, Appl. Phys. Lett. 84, 4 (2004).
[CrossRef]

Eur. Phys. J. D

A. L'Huilleir, D. Descanmps, A. Johansson, J. Norin, J. Mauritsson, and C. G. Wahlstrom, Eur. Phys. J. D 22, 3 (2003).
[CrossRef]

J. Appl. Phys.

S. Thakoor, J. I. Lamb, A. P. Thakoor, and S. K. Khanna, J. Appl. Phys. 58, 4643 (1995).
[CrossRef]

Jpn. J. Appl. Phys. Part 1

T. Ozaki, K. Yamamoto, Li. Ruxin, and H. Kuroda, Jpn. J. Appl. Phys. Part 1 40, 1018 (2001).
[CrossRef]

Nature

T. Sekikawa, A. Kosuge, T. Kanai, and S. Watanabe, Nature 432, 605 (2004).
[CrossRef] [PubMed]

Opt. Lett.

Phys. Rev. Lett.

Y. Nabekawa, H. Hasegawa, E. J. Takahashi, and K. Midorikawa, Phys. Rev. Lett. 94, 043001 (2005).
[CrossRef] [PubMed]

Other

''Material Optical Properties,'' Center for Nanolithography Research at the Rochester Institute of Technology, http://www.rit.edu/~635dept5/cgi-bin/database.cgi?NbN.csv.

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Figures (3)

Fig. 1
Fig. 1

Calculated reflectivities of NbN films deposited on a Si substrates as functions of the incident angles with various film thicknesses in the EUV region.

Fig. 2
Fig. 2

Measured reflectivities of NbN films deposited on Si substrates as functions of the incident angles for the pump pulses. The solid curves illustrate the calculated reflectivities.

Fig. 3
Fig. 3

High-order harmonic spectra, observed with and without beam separators, and the reflectivity of the NbN beam separator at the pump pulse’s Brewster angle. The open circle was the experimentally obtained reflectivity; the solid curve was the calculated one. The insets are the normalized spatial profiles of the 59th harmonic ( 13.4 nm ) measured with and without beam separators.

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