Abstract

We have acquired images with a spatial resolution better than 38nm by using a tabletop microscope that combines 13nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 1520nm spatial resolution and a picosecond time resolution.

© 2006 Optical Society of America

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2005 (7)

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, Phys. Rev. A 72, 053807 (2005).
[CrossRef]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, Opt. Lett. 30, 165 (2005).
[CrossRef] [PubMed]

G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. Marconi, and J. J. Rocca, Opt. Lett. 30, 2095 (2005).
[CrossRef] [PubMed]

J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, Opt. Lett. 30, 2581 (2005).
[CrossRef] [PubMed]

2004 (1)

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

2003 (1)

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

2000 (2)

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

1999 (1)

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461-472; M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 595-606.

1998 (1)

J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998).

1995 (1)

1992 (2)

1989 (1)

Alessi, D.

Anderson, E.

Anderson, E. H.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998).

Artioukov, I. A.

Asadchikov, V. E.

Attwood, D.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Attwood, D. T.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998).

L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, Jr., J. Brase, J. A. Koch, R. A. London, B. J. MacGowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, Opt. Lett. 17, 754 (1992).
[CrossRef] [PubMed]

Backus, S.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Barbee, T. W.

Bartels, R. A.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Berglund, M.

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

Berrill, M.

Born, M.

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461-472; M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 595-606.

Brase, J.

Brewer, C.

Brizuela, F.

Byer, R. L.

Chao, W.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Da Silva, L. B.

Daido, H.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Denbeaux, G.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

DiCicco, D. S.

Dunn, J.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Fedorenko, A. I.

Gagnon, E.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Gershgoren, E.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Grisham, M.

Harteneck, B.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Harteneck, B. D.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

Hasegawa, N.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Heck, J. M.

J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998).

Heinzmann, U.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Hertz, H. M.

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

Johnson, L.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Kado, M.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Kapteyn, H. C.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Kasyanov, Y. S.

Kato, Y.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Kawachi, T.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Keenan, R.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Kern, D.

Kim, D.

Kishimoto, M.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Kleineberg, U.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Koch, J. A.

Kondratenko, V. V.

Larotonda, M. A.

Libertun, A. R.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Liddle, J. A.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, Nature 435, 1210 (2005).
[CrossRef] [PubMed]

Liu, Y.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

London, R. A.

Lu, P.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Lucero, A.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Luther, B. M.

MacGowan, B. J.

Mancini, H.

Marconi, M.

Marconi, M. C.

Matthews, D. L.

Menoni, C. S.

Meyer-Ilse, W.

J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, J. X-Ray Sci. Technol. 8, 95 (1998).

Minyard, D.

Mrowka, S.

Murnane, M. M.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Nagai, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Nagashima, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Olynick, D. L.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Patel, P. K.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Paul, A.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Peuker, M.

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

Price, D. F.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Raymondson, D.

A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

Rocca, J. J.

Rosser, R.

Rymell, L.

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

Serov, R. V.

Shlyaptsev, V. N.

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, Opt. Lett. 30, 165 (2005).
[CrossRef] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, Phys. Rev. A 72, 053807 (2005).
[CrossRef]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Smith, R. F.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, Phys. Rev. Lett. 94, 103901 (2005).
[CrossRef] [PubMed]

Spielmann, C.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Stone, G.

Suckewer, S.

Sukegawa, K.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Tai, R.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Takenaka, H.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Tanaka, M.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Tang, H.

M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, J. Phys. IV 104, 141 (2003).

Trail, J. A.

Trebes, J. E.

Vaschenko, G.

Veklerov, E.

E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, J. Vac. Sci. Technol. B 18, 2970 (2000).
[CrossRef]

Vinogradov, A. V.

Wang, Y.

Westerwalbesloh, T.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Wieland, M.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

Wilhein, T.

M. Wieland, C. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005).
[CrossRef]

M. Berglund, L. Rymell, M. Peuker, T. Wilhein, and H. M. Hertz, J. Microsc. (Oxford) 197, 268 (2000).
[CrossRef] [PubMed]

Wolf, E.

M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 461-472; M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, 1999), pp. 595-606.

Yorkey, T.

Yulin, S. A.

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A. R. Libertun, X. Zhang, A. Paul, D. Raymondson, E. Gershgoren, E. Gagnon, S. Backus, M. M. Murnane, H. C. Kapteyn, R. A. Bartels, Y. Liu, and D. T. Attwood, in Conference on Lasers and Electro-Optics, Vol. 96 of OSA Trends in Optics and Photonics (Optical Society of America, 2004), paper JMD4.

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Figures (3)

Fig. 1
Fig. 1

Schematic diagram of the 13 nm wavelength imaging system.

Fig. 2
Fig. 2

Large-field-of-view image of a set of radial spokes obtained with a Δ r = 80 nm zone plate at 13.9 nm laser wavelength illumination in a 20 s exposure. The lines resolved in the center of the pattern are at a 60 nm half-period.

Fig. 3
Fig. 3

Images of the (a) 50 and (b) 38 nm half-period line patterns obtained with a Δ r = 50 nm zone plate and 13.2 nm wavelength laser illumination by using a 20 s exposure time. The cross section of the 38 nm lines image demonstrates that the microscope resolution is better than 38 nm .

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