Abstract

A new, optically addressed deformable mirror device is demonstrated. The device consists of a pixellated metalized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A conductive transparent ZnO layer is deposited on the back side of the substrate. A very high-frequency AC bias is applied between the membrane and the back electrode of the device. The membrane is deformed when the back of the device is illuminated because of impedance and bias redistribution between two cascaded impedances. We fabricated, demonstrated, and modeled the operation of this device.

© 2006 Optical Society of America

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