Ablation of holes with diameters as small as and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
© 2006 Optical Society of America
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