Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

© 2006 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).
  2. T. V. Vorburger and E. C. Teague, Precis. Eng. 3, 61 (1981).
    [CrossRef]
  3. R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).
  4. C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).
  5. P. Lehmann and G. Goch, Ann. Int. Inst. Product. Eng. (CIRP) 49, 419 (2000).
  6. O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
    [CrossRef]
  7. C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
    [CrossRef]
  8. S. H. Wang, Y. H. Tian, C. J. Tay, and C. G. Quan, Appl. Opt. 42, 1318 (2003).
    [CrossRef] [PubMed]
  9. A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
    [CrossRef]
  10. S. Kuwamura and I. Yamaguchi, Appl. Opt. 36, 4473 (1997).
    [CrossRef] [PubMed]
  11. A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
    [CrossRef]
  12. A. Yamamoto and I. Yamaguchi, Opt. Laser Technol. 32, 261 (2000).
    [CrossRef]
  13. A. Yamamoto and I. Yamaguchi, Opt. Rev. 9, 112 (2002).
    [CrossRef]
  14. I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
    [CrossRef]
  15. D. J. Lin, X. Jiang, F. Xie, W. Zhang, L. Zhang, and I. Bennion, Opt. Express 12, 5729 (2004).
    [CrossRef] [PubMed]
  16. X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
    [CrossRef]
  17. K. Creath, in Progress in Optics: Volume XXVI, E.Wolf, ed. (Elsevier, 1988), pp. 349-393.
    [CrossRef]

2006 (1)

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

2004 (2)

2003 (2)

S. H. Wang, Y. H. Tian, C. J. Tay, and C. G. Quan, Appl. Opt. 42, 1318 (2003).
[CrossRef] [PubMed]

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

2002 (1)

A. Yamamoto and I. Yamaguchi, Opt. Rev. 9, 112 (2002).
[CrossRef]

2001 (1)

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

2000 (3)

A. Yamamoto and I. Yamaguchi, Opt. Laser Technol. 32, 261 (2000).
[CrossRef]

P. Lehmann and G. Goch, Ann. Int. Inst. Product. Eng. (CIRP) 49, 419 (2000).

I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
[CrossRef]

1998 (1)

O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
[CrossRef]

1997 (1)

1987 (1)

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

1984 (1)

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

1981 (1)

T. V. Vorburger and E. C. Teague, Precis. Eng. 3, 61 (1981).
[CrossRef]

1980 (1)

R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).

Bennion, I.

Blunt, L.

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

Brodmann, R.

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

Creath, K.

K. Creath, in Progress in Optics: Volume XXVI, E.Wolf, ed. (Elsevier, 1988), pp. 349-393.
[CrossRef]

Gast, T.

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

Goch, G.

P. Lehmann and G. Goch, Ann. Int. Inst. Product. Eng. (CIRP) 49, 419 (2000).

Jiang, X.

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

D. J. Lin, X. Jiang, F. Xie, W. Zhang, L. Zhang, and I. Bennion, Opt. Express 12, 5729 (2004).
[CrossRef] [PubMed]

Kasashima, N.

O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
[CrossRef]

Kim, S. W.

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

Kuo, C. C.

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

Kuwamura, S.

Lee, C. S.

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

Lehmann, P.

P. Lehmann and G. Goch, Ann. Int. Inst. Product. Eng. (CIRP) 49, 419 (2000).

Lin, D. J.

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

D. J. Lin, X. Jiang, F. Xie, W. Zhang, L. Zhang, and I. Bennion, Opt. Express 12, 5729 (2004).
[CrossRef] [PubMed]

Miyoshi, T.

A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
[CrossRef]

Mori, K.

O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
[CrossRef]

Quan, C.

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

Quan, C. G.

Ryabov, O.

O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
[CrossRef]

Shang, H. M.

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

Sunouchi, K.

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

Taguchi, A.

A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
[CrossRef]

Takahashi, S.

A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
[CrossRef]

Takaya, Y.

A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
[CrossRef]

Tashiro, H.

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

Tay, C. J.

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

S. H. Wang, Y. H. Tian, C. J. Tay, and C. G. Quan, Appl. Opt. 42, 1318 (2003).
[CrossRef] [PubMed]

Teague, E. C.

T. V. Vorburger and E. C. Teague, Precis. Eng. 3, 61 (1981).
[CrossRef]

R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).

Thurn, G.

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

Tian, Y. H.

Tönshoff, H. K.

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

Vorburger, T. V.

T. V. Vorburger and E. C. Teague, Precis. Eng. 3, 61 (1981).
[CrossRef]

R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).

Wada, S.

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

Wang, S. H.

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

S. H. Wang, Y. H. Tian, C. J. Tay, and C. G. Quan, Appl. Opt. 42, 1318 (2003).
[CrossRef] [PubMed]

Wirtz, A.

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

Xie, F.

Yamaguchi, I.

A. Yamamoto and I. Yamaguchi, Opt. Rev. 9, 112 (2002).
[CrossRef]

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
[CrossRef]

A. Yamamoto and I. Yamaguchi, Opt. Laser Technol. 32, 261 (2000).
[CrossRef]

S. Kuwamura and I. Yamaguchi, Appl. Opt. 36, 4473 (1997).
[CrossRef] [PubMed]

Yamamoto, A.

A. Yamamoto and I. Yamaguchi, Opt. Rev. 9, 112 (2002).
[CrossRef]

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

A. Yamamoto and I. Yamaguchi, Opt. Laser Technol. 32, 261 (2000).
[CrossRef]

I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
[CrossRef]

Yano, M.

I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
[CrossRef]

Yim, D. Y.

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

Young, R. D.

R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).

Zhang, L.

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

D. J. Lin, X. Jiang, F. Xie, W. Zhang, L. Zhang, and I. Bennion, Opt. Express 12, 5729 (2004).
[CrossRef] [PubMed]

Zhang, W.

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

D. J. Lin, X. Jiang, F. Xie, W. Zhang, L. Zhang, and I. Bennion, Opt. Express 12, 5729 (2004).
[CrossRef] [PubMed]

Ann. Int. Inst. Product. Eng. (CIRP) (4)

R. Brodmann, T. Gast, G. Thurn, and A. Wirtz, Ann. Int. Inst. Product. Eng. (CIRP) 33, 403 (1984).

C. S. Lee, S. W. Kim, D. Y. Yim, and H. K. Tönshoff, Ann. Int. Inst. Product. Eng. (CIRP) 36, 425 (1987).

P. Lehmann and G. Goch, Ann. Int. Inst. Product. Eng. (CIRP) 49, 419 (2000).

R. D. Young, T. V. Vorburger, and E. C. Teague, Ann. Int. Inst. Product. Eng. (CIRP) 29, 435 (1980).

Appl. Opt. (2)

Meas. Sci. Technol. (1)

X. Jiang, D. J. Lin, L. Blunt, W. Zhang, and L. Zhang, Meas. Sci. Technol. 17, 483 (2006).
[CrossRef]

Opt. Commun. (1)

C. J. Tay, S. H. Wang, C. Quan, and H. M. Shang, Opt. Commun. 218, 1 (2003).
[CrossRef]

Opt. Eng. (1)

I. Yamaguchi, A. Yamamoto, and M. Yano, Opt. Eng. 39, 40 (2000).
[CrossRef]

Opt. Express (1)

Opt. Laser Technol. (1)

A. Yamamoto and I. Yamaguchi, Opt. Laser Technol. 32, 261 (2000).
[CrossRef]

Opt. Lasers Eng. (1)

O. Ryabov, K. Mori, and N. Kasashima, Opt. Lasers Eng. 30, 251 (1998).
[CrossRef]

Opt. Rev. (2)

A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, Opt. Rev. 8, 59 (2001).
[CrossRef]

A. Yamamoto and I. Yamaguchi, Opt. Rev. 9, 112 (2002).
[CrossRef]

Precis. Eng. (2)

A. Taguchi, T. Miyoshi, Y. Takaya, and S. Takahashi, Precis. Eng. 28, 152 (2004).
[CrossRef]

T. V. Vorburger and E. C. Teague, Precis. Eng. 3, 61 (1981).
[CrossRef]

Other (1)

K. Creath, in Progress in Optics: Volume XXVI, E.Wolf, ed. (Elsevier, 1988), pp. 349-393.
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

Schematic diagram of the proposed surface measurement system.

Fig. 2
Fig. 2

Results of repeatability experiment. The surface was measured five times by sweeping the laser wavelengths between 1560 and 1595 nm , which corresponds to a 1.89 mm scan range across the surface. (a) Raw data, (b) data without dc offset.

Fig. 3
Fig. 3

Results of displacement experiment. The optical path difference was altered in 50 nm steps over a 250 nm range. (a) Measured displacements of each consecutive step, (b) average displacement and linear fit.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

S = f ( Δ λ d ) ,
I ( x ) = A ( x ) + B ( x ) cos { 2 π λ ( x ) [ 2 h ( x ) + l ] } ,
h ( x ) = [ φ ( x ) 4 π ] λ ( x ) .

Metrics