Abstract

We have developed a near-field optical probe that uses a triangular metallic plate with a three-dimensionally tapered apex as a light source for thermally assisted magnetic recording. Numerical analysis using a finite-element method shows that the size of the optical spot generated at the apex is 15nm×20nm, and the efficiency (defined as the ratio between the power of the optical near field at the surface of the recording medium and that of the incident light) is 15% when the incident light is focused by a lens with a numerical aperture of 0.8. The metallic plate was fabricated on the surface of a quartz slider and used for writing marks on a phase change recording medium. The marks were observed with a scanning electron microscope, and we confirmed that marks with a diameter of 40nm were successfully written on the medium.

© 2006 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
    [CrossRef]
  2. M.Ohtsu, ed., Near-field Nano/Atom Optics and Technology (Springer, 1998).
    [CrossRef]
  3. E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
    [CrossRef]
  4. S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
    [CrossRef]
  5. T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
    [CrossRef]
  6. T. Yatsui, M. Kourogi, and M. Ohtsu, Appl. Phys. Lett. 73, 2090 (1998).
    [CrossRef]
  7. T. Yatsui, M. Kourogi, K. Tsutsui, J. Takahashi, and M. Ohtsu, Opt. Lett. 25, 1279 (2000).
    [CrossRef]
  8. U. C. Fischer, Ultramicroscopy 42, 393 (1992).
    [CrossRef]
  9. J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
    [CrossRef]
  10. X. Shi, L. Hesselink, and R. L. Thornton, Opt. Lett. 28, 1320 (2003).
    [CrossRef] [PubMed]
  11. T. Thio, K. M. Pellerin, R. A. Linke, H. J. Lezec, and T. W. Ebbesen, Opt. Lett. 26, 1972 (2001).
    [CrossRef]
  12. T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
    [CrossRef]
  13. E.D.Palik, ed., Handbook of Optical Constants of Solids (Academic, 1985).
  14. T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
    [CrossRef]
  15. M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

2004 (2)

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

2003 (1)

2001 (1)

2000 (1)

1999 (1)

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

1998 (1)

T. Yatsui, M. Kourogi, and M. Ohtsu, Appl. Phys. Lett. 73, 2090 (1998).
[CrossRef]

1997 (1)

J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
[CrossRef]

1996 (2)

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

1992 (2)

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

U. C. Fischer, Ultramicroscopy 42, 393 (1992).
[CrossRef]

1989 (1)

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Andoo, K.

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Anzai, Y.

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

Betzig, E.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Chang, C.-H.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Ebbesen, T. W.

Finn, P. L.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Fischer, U. C.

J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
[CrossRef]

U. C. Fischer, Ultramicroscopy 42, 393 (1992).
[CrossRef]

Fuchs, H.

J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
[CrossRef]

Fujita, K.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Gyorgy, E. M.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Hesselink, L.

Hirotsune, A.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Hosaka, S.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Kiguchi, M.

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

Kikukawa, A.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Koglin, J.

J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
[CrossRef]

Kourogi, M.

Krammer, S.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Kryder, M. H.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Kusano, J.

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

Lezec, H. J.

Linke, R. A.

Matsumoto, T.

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

Minemura, H.

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

Miyamoto, H.

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

Miyamoto, M.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Miyauchi, Y.

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Mononobe, S.

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

Nemoto, H.

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

Ohtsu, M.

T. Yatsui, M. Kourogi, K. Tsutsui, J. Takahashi, and M. Ohtsu, Opt. Lett. 25, 1279 (2000).
[CrossRef]

T. Yatsui, M. Kourogi, and M. Ohtsu, Appl. Phys. Lett. 73, 2090 (1998).
[CrossRef]

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

Pellerin, K. M.

Saga, H.

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

Saiki, T.

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

Saito, N.

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

Shi, X.

Shimano, T.

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

Shintani, T.

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Sukeda, H.

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

Takahashi, J.

Takahashi, M.

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

Tamura, R.

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Terao, M.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Thio, T.

Thornton, R. L.

Trautman, J. K.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Tsutsui, K.

Ushiyama, J.

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

Wolfe, R.

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

Yasuoka, H.

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Yatsui, T.

Yoshida, M.

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Appl. Phys. Lett. (4)

E. Betzig, J. K. Trautman, R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, and C.-H. Chang, Appl. Phys. Lett. 61, 142 (1992).
[CrossRef]

T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996).
[CrossRef]

T. Yatsui, M. Kourogi, and M. Ohtsu, Appl. Phys. Lett. 73, 2090 (1998).
[CrossRef]

T. Shintani, Y. Anzai, H. Minemura, H. Miyamoto, and J. Ushiyama, Appl. Phys. Lett. 85, 639 (2004).
[CrossRef]

J. Appl. Phys. (2)

T. Matsumoto, T. Shimano, H. Saga, H. Sukeda, and M. Kiguchi, J. Appl. Phys. 95, 3901 (2004).
[CrossRef]

S. Hosaka, T. Shintani, M. Miyamoto, A. Kikukawa, A. Hirotsune, M. Terao, M. Yoshida, K. Fujita, and S. Krammer, J. Appl. Phys. 79, 8082 (1996).
[CrossRef]

Jpn. J. Appl. Phys., Part 1 (1)

H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., Part 1 38, 1839 (1999).
[CrossRef]

Opt. Lett. (3)

Phys. Rev. B (1)

J. Koglin, U. C. Fischer, and H. Fuchs, Phys. Rev. B 55, 7977 (1997).
[CrossRef]

Proc. SPIE (1)

M. Terao, Y. Miyauchi, K. Andoo, H. Yasuoka, and R. Tamura, in Proc. SPIE 1078, 2 (1989).

Ultramicroscopy (1)

U. C. Fischer, Ultramicroscopy 42, 393 (1992).
[CrossRef]

Other (2)

M.Ohtsu, ed., Near-field Nano/Atom Optics and Technology (Springer, 1998).
[CrossRef]

E.D.Palik, ed., Handbook of Optical Constants of Solids (Academic, 1985).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Schematic of the probe: (a) bird’s eye view and (b) cross-sectional view.

Fig. 2
Fig. 2

Intensity distribution of the optical near-field calculated on the surface of the recording layer: (a) flat probe and (b) probe with the beaked apex. The intensity represents the ratio between power density of the optical near field and that of the incident light.

Fig. 3
Fig. 3

SEM images of the fabricated plates: (a) top view of the fabricated nanobeak and (b) cross-sectional view of the line pattern fabricated by using the same process as for the nanobeak.

Fig. 4
Fig. 4

SEM images of the medium after writing and etching. The inset shows a magnified view of one of the marks.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

η = S p near d S S p in d S ,

Metrics