Abstract

Large-area surface-plasmon polariton (SPP) interference lithography is presented, which uses an attenuated total reflection-coupling mode to excite the interference of the SPPs. The interference of the SPPs causes a highly directional intensity range in a finite depth of the electric field, which is good for noncontact. Finite-difference time-domain simulations of the interference on a thin resist layer show that broad-beam illumination with a p-polarized light at a wavelength of 441nm can produce features as small as 60nm with high contrast, smaller than λ∕7. Our results illustrate the potential for patterning periodic structures over large areas at low cost.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique

Mingyang He, Zhiyou Zhang, Sha Shi, Jinglei Du, Xupeng Li, Shuhong Li, and Wenying Ma
Opt. Express 18(15) 15975-15980 (2010)

Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons

Hongchao Liu, Weijie Kong, Kaipeng Liu, Chengwei Zhao, Wenjuan Du, Changtao Wang, Ling Liu, Ping Gao, Mingbo Pu, and Xiangang Luo
Opt. Express 25(17) 20511-20521 (2017)

High throughput fabrication of large-area plasmonic color filters by soft-X-ray interference lithography

Libin Sun, Xiaolin Hu, Qingjun Wu, Liansheng Wang, Jun Zhao, Shumin Yang, Renzhong Tai, Hans-Jorg Fecht, Dong-Xian Zhang, Li-Qiang Wang, and Jian-Zhong Jiang
Opt. Express 24(17) 19112-19121 (2016)

More Recommended Articles

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription