Abstract

Lensless in-line digital holographic interferometry has the potential for vibration analysis of objects smaller than 5mm in diameter. This is particularly useful for dynamic characterization of microelectromechanical systems devices. To achieve this, there is a need to magnify the object wave, which is done using a diverging beam. It is observed that an increase in the object-to-CCD distance increases the sensitivity of the amplitude-modulated time-average fringes. At the same time the effect on phase information that represents the mean static deformation of a vibrating object is studied. It is also observed that a reduction in the object-to-CCD distance increases the phase sensitivity as evidenced by the double-exposure time-average fringes. The experimental observation and a theoretical explanation for this contradictory phenomenon are presented.

© 2006 Optical Society of America

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