Abstract

We have demonstrated a silicon-on-insulator-based photonic bus with integrated splitters, a demultiplexer, attenuators, and a multiplexer for loop signal routing and multichannel optical wavelength selection. The integrated photonic bus has demonstrated a 33+dB optical cross talk, a 32+dB extinction ratio, and a rise time of 7.6μs with two-stage Mach–Zehnder attenuators.

© 2006 Optical Society of America

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References

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  1. R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.
  2. R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
    [CrossRef]
  3. R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
    [CrossRef]
  4. Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

2003 (1)

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

2000 (2)

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

Chan, J. K.

Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

Espinola, R. L.

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

Hashimoto, T.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Jones, R.

R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.

Kasahara, R.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Liao, L.

R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.

Magari, K.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Ogawa, I.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Osgood, R. M.

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

Paniccia, M.

R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.

Rong, H.

R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.

Sugita, A.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Suzaki, Y.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Tang, Y. S.

Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

Tsai, M.-C.

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

Xu, Y.

Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

Yanagisawa, M.

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Yardley, J. T.

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood, IEEE Photon. Technol. Lett. 15, 1366 (2003).
[CrossRef]

R. Kasahara, M. Yanagisawa, A. Sugita, I. Ogawa, T. Hashimoto, Y. Suzaki, and K. Magari, IEEE Photon. Technol. Lett. 12, 34 (2000).
[CrossRef]

Proc. SPIE (1)

Y. S. Tang, Y. Xu, and J. K. Chan, in Proc. SPIE 3953, 1 (2000).

Other (1)

R. Jones, L. Liao, H. Rong, and M. Paniccia, Silicon Photonics: Opportunity, Applications and Recent Results (IEEE LEOS Annual Meeting, 2005), pp. 377-379.

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Figures (5)

Fig. 1
Fig. 1

Schematic configuration of the fabricated optical bus.

Fig. 2
Fig. 2

SEM cross section of (a) ridge waveguide profile and (b) ridge waveguide sidewall after etching by Cl 2 chemistry.

Fig. 3
Fig. 3

Cross section of deep trench etching for thermal isolation from SEM pictures.

Fig. 4
Fig. 4

(a) Transmittance between input and output ports. (b) Transmittance with applied voltages on channel 10 via two staged MZTOAs (220 and 35 mW individually on the 1st and 2nd stages).

Fig. 5
Fig. 5

Time response of SOI-based MZTOA for (a) rise time and (b) fall time.

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