Abstract

A resonant absorption cavity that couples long-wavelength infrared (LWIR) light into a movable plate has been demonstrated for thermal detectors, especially microbolometers. Each device is continuously tunable over 8.711.1μm by using electrostatic actuation with voltages from 0 to 42V. The width of the resonance is relatively broad, approximately 1.5μm, to match the large widths of many spectral features in the LWIR. At an actuation voltage of 45V, the device switches into a broadband mode with an absorption width of 2.83μm. This latter mode is used to enhance sensitivity in low-light situations in which little spectral information is present.

© 2006 Optical Society of America

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