Abstract

A resonant absorption cavity that couples long-wavelength infrared (LWIR) light into a movable plate has been demonstrated for thermal detectors, especially microbolometers. Each device is continuously tunable over 8.711.1μm by using electrostatic actuation with voltages from 0 to 42V. The width of the resonance is relatively broad, approximately 1.5μm, to match the large widths of many spectral features in the LWIR. At an actuation voltage of 45V, the device switches into a broadband mode with an absorption width of 2.83μm. This latter mode is used to enhance sensitivity in low-light situations in which little spectral information is present.

© 2006 Optical Society of America

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References

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  1. R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
    [Crossref]
  2. K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
    [Crossref]
  3. E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.
  4. M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
    [Crossref]
  5. J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
    [Crossref]
  6. S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
    [Crossref]
  7. R. A. Wood, in Uncooled Infrared Imaging Systems and Arrays, P.W.Kruse and D.D.Skatrud, eds., Vol. 47 of Semiconductors and Semimetals (Academic, 1997), Chap. 3, pp. 43-121.
    [Crossref]
  8. W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
    [Crossref]
  9. H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, 2001).
    [Crossref]
  10. E. Palik, Handbook of Optical Constants of Solids (Academic, 1998).

2003 (1)

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

2002 (1)

W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
[Crossref]

1997 (1)

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

1995 (1)

M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
[Crossref]

1991 (2)

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Arsenault, L.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Campbell, J. C.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Chang-Hasnain, C. J.

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

Chyi, J.-I.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Daleiden, J.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Dehe, A.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Deppe, D. G.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Harris, J. S.

M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
[Crossref]

Hartnagel, H. L.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

He, Y. S.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Hebeler, C.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Hillmer, H.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Irmer, S.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Kishino, K.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Kuchibhotla, R.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Langenham, F.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Larson, M. C.

M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
[Crossref]

Lei, C.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Li, G. S.

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

Macleod, H. A.

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, 2001).
[Crossref]

Meissner, P.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Mo, H.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Palik, E.

E. Palik, Handbook of Optical Constants of Solids (Academic, 1998).

Peerlings, J.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Pezeshki, B.

M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
[Crossref]

Prott, C.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Rangelov, V.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Reed, J.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Romer, F.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Song, W. B.

W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
[Crossref]

Srinivasan, A.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Strassner, M.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Streetman, B.

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Sutton, M.

W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
[Crossref]

Talghader, J. J.

W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
[Crossref]

Tarraf, A.

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

Tilsch, M.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Unlu, S.

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

Vail, E. C.

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

Vogt, A.

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

Wood, R. A.

R. A. Wood, in Uncooled Infrared Imaging Systems and Arrays, P.W.Kruse and D.D.Skatrud, eds., Vol. 47 of Semiconductors and Semimetals (Academic, 1997), Chap. 3, pp. 43-121.
[Crossref]

Wu, M. S.

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

Yuen, W.

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

Appl. Phys. Lett. (1)

W. B. Song, M. Sutton, and J. J. Talghader, Appl. Phys. Lett. 81, 1216 (2002).
[Crossref]

IEEE J. Quantum Electron. (1)

K. Kishino, S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Mo, IEEE J. Quantum Electron. 27, 2025 (1991).
[Crossref]

IEEE Photon. Technol. Lett. (4)

M. C. Larson, B. Pezeshki, and J. S. Harris, IEEE Photon. Technol. Lett. 7, 382 (1995).
[Crossref]

J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenham, P. Meissner, and H. L. Hartnagel, IEEE Photon. Technol. Lett. 9, 1235 (1997).
[Crossref]

S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Romer, M. Strassner, A. Tarraf, and H. Hillmer, IEEE Photon. Technol. Lett. l5, 434 (2003).
[Crossref]

R. Kuchibhotla, A. Srinivasan, J. C. Campbell, C. Lei, D. G. Deppe, Y. S. He, and B. Streetman, IEEE Photon. Technol. Lett. 3, 354 (1991).
[Crossref]

Other (4)

R. A. Wood, in Uncooled Infrared Imaging Systems and Arrays, P.W.Kruse and D.D.Skatrud, eds., Vol. 47 of Semiconductors and Semimetals (Academic, 1997), Chap. 3, pp. 43-121.
[Crossref]

E. C. Vail, M. S. Wu, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "A novel widely tunable detector with wavelength tracking," in Optical Fiber Communications Conference, Vol. 8 of 1995 OSA Technical Digest Series (Optical Society of America, 1995), postdeadline paper PD-18-2.

H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, 2001).
[Crossref]

E. Palik, Handbook of Optical Constants of Solids (Academic, 1998).

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Figures (3)

Fig. 1
Fig. 1

Architecture of the tunable integrated filter. Continuous narrowband absorption is obtained by tuning the air gap of the cavity by using electrostatic actuation. Broadband absorption is obtained by bringing the top mirror near the substrate by using a higher voltage state.

Fig. 2
Fig. 2

FTIR measurement of the relative reflectance spectra of a 120 μ m × 120 μ m size filter. When the applied voltage is varied from 0 to 42 V , the narrowband resonance shifts from 11.1 to 8.7 μ m . A broadband resonance centered at 11.3 μ m is created when the voltage is increased to 45 V .

Fig. 3
Fig. 3

Finesse tuning via electrostatic actuation for the device in Fig. 2. The FWHM changes by approximately 87% between the two modes.

Tables (1)

Tables Icon

Table 1 Device Layer Structure with Designed Nominal Thicknesses a

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