Abstract

Holographic femtosecond laser processing with multiplexed phase Fresnel lenses for high-speed parallel fabrication of microstructures is proposed. Use of a spatial light modulator (SLM) allows independent tunability of the diffraction peaks, three-dimensional parallelism, and arbitrary, variable features. The diffraction peaks are made uniform by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the SLM.

© 2006 Optical Society of America

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Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
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K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

2002

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

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T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

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K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

1999

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

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1995

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

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D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Callan, J. P.

Chichkov, B. N.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Davis, K. M.

Du, D.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Feit, M. D.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Finlay, R. J.

Gan, G. K.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Glezer, E. N.

Hara, T.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Hayasaki, Y.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Hee, C. W.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Her, T.-H.

Hirano, K.

Hirao, K.

Hirao, M.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Hosono, H.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Huang, L.

Igasaki, Y.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Inoue, T.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Itoh, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Jiang, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Juodkazis, S.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Kawamura, K.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Kobayashi, Y.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Kondo, T.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Korn, G.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Kumagai, H.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Kuroiwa, Y.

Li, F.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Li, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Liang, W. L.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Liu, X.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Matsuo, S.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Mazur, E.

Midorikawa, K.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Milosavljevic, M.

Misawa, H.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Miura, K.

Momma, C.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Mourou, G.

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

Mukohzaka, N.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Nakamura, S.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Narita, Y.

Nishida, N.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Nishii, J.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Nolte, S.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Obara, M.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Ogawa, T.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Okamoto, T.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Perry, M. D.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Sarukura, N.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Shinagawa, T.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Shore, B. W.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Sivakumar, N. R.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Stuart, B. C.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Sugimoto, N.

Sugimoto, T.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Takeshima, N.

Takita, A.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Tan, B.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Tanaka, S.

Toyoda, H.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Toyoda, K.

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Tünnermann, A.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Venkatakrishnan, K.

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

von Alvensleben, F.

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

Watanabe, W.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yamada, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yoshida, N.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Appl. Phys. A

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, Appl. Phys. A 63, 109 (1996).
[CrossRef]

K. Venkatakrishnan, N. R. Sivakumar, C. W. Hee, B. Tan, W. L. Liang, and G. K. Gan, Appl. Phys. A 77, 959 (2003).
[CrossRef]

Appl. Phys. B

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirao, and H. Hosono, Appl. Phys. B 71, 119 (2000).

Appl. Phys. Lett.

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, Appl. Phys. Lett. 79, 725 (2001).
[CrossRef]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

D. Du, X. Liu, G. Korn, and G. Mourou, Appl. Phys. Lett. 64, 3071 (1994).
[CrossRef]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, Appl. Phys. Lett. 65, 1850 (1994).
[CrossRef]

Opt. Express

Opt. Lett.

Opt. Rev.

Y. Igasaki, F. Li, N. Yoshida, H. Toyoda, T. Inoue, N. Mukohzaka, Y. Kobayashi, and T. Hara, Opt. Rev. 6, 339 (1999).
[CrossRef]

Phys. Rev. Lett.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

Holographic femtosecond laser processing system.

Fig. 2
Fig. 2

(a) Original and (f) optimized MPFL. (b), (g) Respective computer reconstructions. (c), (h) Respective optical reconstructions. (d), (i) Transmission microscope and (e), (j) AFM images of the fabricated area. The vertical scale of the AFM profile is ± 500 nm .

Fig. 3
Fig. 3

(a) Light use efficiency (LUE) of PFL versus NA. (b) MPFL optimized by adjusting the diameter. (c) MPFL producing tuned diffraction peaks.

Fig. 4
Fig. 4

Three-dimensional parallel material processing by single-pulse irradiation. (a) MPFL comprising 15 multiplexed PFLs. (b) Side and (c) axial views of the processed area.

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