Abstract

Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting sub beams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.

© 2006 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef]
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2005

2004

2001

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

K. P. Chen, P. R. Herman, J. Zhang, and R. Tam, Opt. Lett. 26, 771 (2001).
[CrossRef]

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

2000

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

1999

1998

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

1997

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

1987

J. Durnin, J. J. Miceli, Jr., and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Bor, Zs.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Cavallaro, J. R.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Chen, K. P.

K. P. Chen, P. R. Herman, J. Zhang, and R. Tam, Opt. Lett. 26, 771 (2001).
[CrossRef]

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

Durnin, J.

J. Durnin, J. J. Miceli, Jr., and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Eberly, J. H.

J. Durnin, J. J. Miceli, Jr., and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Ehlert, R.

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

Erdélyi, M.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Griebner, U.

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

Grunwald, R.

Herman, P. R.

M. Okoshi, J. Li, and P. R. Herman, Opt. Lett. 30, 2730 (2005).
[CrossRef] [PubMed]

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

K. P. Chen, P. R. Herman, J. Zhang, and R. Tam, Opt. Lett. 26, 771 (2001).
[CrossRef]

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

P. R. Herman, in Excimer Laser Technology, D.Basting and G.Marowsky, eds. (Springer, 2005), p. 221.
[CrossRef]

Horváth, Z. L.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Ihlemann, J.

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Juodkazis, S.

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Kebbel, V.

Konovalov, I.

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

Kühn, H.-J.

Leinhos, U.

Li, J.

Mann, K.

Marcinkevicius, A.

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Marjoribanks, R. S.

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

Marowsky, G.

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Matsuo, S.

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Miceli, J. J.

J. Durnin, J. J. Miceli, Jr., and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Misawa, H.

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Mischke, H.

Mizeikis, V.

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Ness, S.

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

Neumann, U.

Oettl, A.

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

Okoshi, M.

Rehak, W.

Reinecke, W.

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

Schäfer, D.

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Smayling, M. C.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Szabó, G.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Tam, R.

Tittel, F. K.

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Woggon, S.

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

Wulff-Molder, D.

Zhang, J.

Appl. Opt.

Appl. Phys. A

D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Appl. Surf. Sci.

P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000).
[CrossRef]

J. Vac. Sci. Technol. B

M. Erdélyi, Z. L. Horváth, G. Szabó, Zs. Bor, F. K. Tittel, J. R. Cavallaro, and M. C. Smayling, J. Vac. Sci. Technol. B 15, 287 (1997).
[CrossRef]

Jpn. J. Appl. Phys.

R. Grunwald, S. Woggon, U. Griebner, R. Ehlert, and W. Reinecke, Jpn. J. Appl. Phys. 37, 3701 (1998).
[CrossRef]

Opt. Lett.

Phys. Rev. Lett.

J. Durnin, J. J. Miceli, Jr., and J. H. Eberly, Phys. Rev. Lett. 58, 1499 (1987).
[CrossRef] [PubMed]

Proc. SPIE

A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001).
[CrossRef]

Other

P. R. Herman, in Excimer Laser Technology, D.Basting and G.Marowsky, eds. (Springer, 2005), p. 221.
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Optical profilometer image showing the smooth surface profile of an array of cylindrical microaxicons fabricated by vapor deposition of nanolayer Mg F 2 film on a Mg F 2 substrate (thickness 0.5 mm ). The lens meridian has a Gaussian profile of height h max = 195 nm and period Λ 1 = 500 μ m .

Fig. 2
Fig. 2

Experimental arrangement for period-scalable VUV multichannel materials processing. A linear array of focused beams with pseudo-nondiffracting propagation properties are generated by a cylindrical microaxicon array. The Ca F 2 lens ( f = 135 mm ) together with the array–target separation distance D 1 controls the multichannel period Λ 2 .

Fig. 3
Fig. 3

Interferometrically measured surface relief structures in PMMA written by single-shot ablation with a prefocused F 2 laser for distances between the microaxicon array and target of (a) D 1 = 31 and (b) D 2 = 43 mm , yielding respective grating periods of Λ 2 = 200 μ m and 150 μ m (interferometer magnification 5 × ).

Fig. 4
Fig. 4

Data showing linear scaling of the structure period Λ 2 optically transferred into PMMA, with the distance D 1 between the axicon and target.

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