Abstract

We demonstrate the use of free-standing thin films of a complex oxide for chip-scale optical filtering. The films are used as low-order etalons with very large free spectral ranges that exceed 6.78THz (>50nm at 1550nm) and use a small chip area (<500μm2) when they are integrated. The films are produced by crystal ion slicing; this process exfoliates a micrometers-thin layer of single-crystal optical material from a bulk parent by means of high-energy-ion implantation. The etalons, which are 10μm thick with Ag deposited on both surfaces, are integrated into a silica-on-silicon waveguide block.

© 2005 Optical Society of America

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  1. A. Tervonen, in IP Over WDM: Building the Next Generation Optical Internet, S. Dixit, ed. (Wiley, New York, 2003), pp. 59–99.
  2. S. Kartalopoulos, Introduction to DWDM Technology: Data in a Rainbow (Institute of Electrical and Electronics Engineers, Piscataway, N.J., 2000).
  3. R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
    [CrossRef]
  4. M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
    [CrossRef]
  5. A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
    [CrossRef]
  6. T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
    [CrossRef]
  7. A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
    [CrossRef]
  8. T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
    [CrossRef]
  9. A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
    [CrossRef]
  10. J. H. Lehman, A. M. Radojevic, and R. M. Osgood, Opt. Lett. 25, 1657 (2000).
    [CrossRef]
  11. J. J. Monzon and L. L. Sanchez-Soto, Pure Appl. Opt. 1, 219 (1992).
    [CrossRef]
  12. M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
    [CrossRef]

2003

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

2002

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

2000

T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
[CrossRef]

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

J. H. Lehman, A. M. Radojevic, and R. M. Osgood, Opt. Lett. 25, 1657 (2000).
[CrossRef]

1999

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
[CrossRef]

1998

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

1992

J. J. Monzon and L. L. Sanchez-Soto, Pure Appl. Opt. 1, 219 (1992).
[CrossRef]

Absil, P. P.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Bakhru, H.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Bakhru, S.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

Bartek, M.

M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
[CrossRef]

Calhoun, L. C.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Cargill, G. S.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Correia, J. H.

M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
[CrossRef]

Cross, L. E.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Evans, C.

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

Grover, R.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Ho, P.-T.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Hryniewicz, J. V.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Ibrahim, T. A.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Izuhara, T.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

Johnson, F. G.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Kartalopoulos, S.

S. Kartalopoulos, Introduction to DWDM Technology: Data in a Rainbow (Institute of Electrical and Electronics Engineers, Piscataway, N.J., 2000).

Kumar, A.

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Lehman, J. H.

Levy, M.

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Liu, R.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Monzon, J. J.

J. J. Monzon and L. L. Sanchez-Soto, Pure Appl. Opt. 1, 219 (1992).
[CrossRef]

Osgood, R. M.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
[CrossRef]

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

J. H. Lehman, A. M. Radojevic, and R. M. Osgood, Opt. Lett. 25, 1657 (2000).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

Radojevic, A. M.

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

J. H. Lehman, A. M. Radojevic, and R. M. Osgood, Opt. Lett. 25, 1657 (2000).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

Ramadan, T. A.

T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
[CrossRef]

Roth, R.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

Roy, N. A.

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

Sanchez-Soto, L. L.

J. J. Monzon and L. L. Sanchez-Soto, Pure Appl. Opt. 1, 219 (1992).
[CrossRef]

Tervonen, A.

A. Tervonen, in IP Over WDM: Building the Next Generation Optical Internet, S. Dixit, ed. (Wiley, New York, 2003), pp. 59–99.

Tian, C.

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

Van, V.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

Wolffenbuttel, R. F.

M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
[CrossRef]

Appl. Phys. Lett.

M. Levy, R. M. Osgood, R. Liu, L. E. Cross, G. S. Cargill, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
[CrossRef]

A. M. Radojevic, M. Levy, R. M. Osgood, A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
[CrossRef]

T. A. Ramadan, M. Levy, and R. M. Osgood, Appl. Phys. Lett. 76, 1407 (2000).
[CrossRef]

Electron. Lett.

T. Izuhara, R. Roth, R. M. Osgood, S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
[CrossRef]

IEEE Photonics Technol. Lett.

A. M. Radojevic, R. M. Osgood, M. Levy, A. Kumar, and H. Bakhru, IEEE Photonics Technol. Lett. 12, 1653 (2000).
[CrossRef]

A. M. Radojevic, R. M. Osgood, N. A. Roy, and H. Bakhru, IEEE Photonics Technol. Lett. 14, 322 (2002).
[CrossRef]

J. Lightwave Technol.

R. Grover, V. Van, T. A. Ibrahim, P. P. Absil, L. C. Calhoun, F. G. Johnson, J. V. Hryniewicz, and P.-T. Ho, J. Lightwave Technol. 20, 900 (2002).
[CrossRef]

J. Micromech. Microeng.

M. Bartek, J. H. Correia, and R. F. Wolffenbuttel, J. Micromech. Microeng. 9, 162 (1999).
[CrossRef]

Opt. Lett.

Pure Appl. Opt.

J. J. Monzon and L. L. Sanchez-Soto, Pure Appl. Opt. 1, 219 (1992).
[CrossRef]

Other

A. Tervonen, in IP Over WDM: Building the Next Generation Optical Internet, S. Dixit, ed. (Wiley, New York, 2003), pp. 59–99.

S. Kartalopoulos, Introduction to DWDM Technology: Data in a Rainbow (Institute of Electrical and Electronics Engineers, Piscataway, N.J., 2000).

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Figures (3)

Fig. 1
Fig. 1

Transmission of our free-standing ion-sliced filter (nonintegrated).

Fig. 2
Fig. 2

(a) Integration schematic. (b) Electron micrographs of an ion-sliced, 10 - μ m -thick FP filter integrated into a 23 - μ m -wide trench; the inset shows a different viewing angle.

Fig. 3
Fig. 3

Transmission of our integrated CIS FP filter. The small undulation between the resonances is due to stray interference in the test setup.

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