Abstract

A novel self-processing silica–zirconia hybrid solgel material has been developed and employed in one-step fabrication of micrometer-period sinusoidal phase gratings. In the process, the gratings with a sinusoidal profile were corrugated on the surface of the solgel film by UV exposure using the Lloyd’s mirror setup. No further development or etching step is needed to reveal the sinusoidal profile because the corrugation is formed due to the self-processing property of the solgel material, which is robust enough to be used as an end product. The period, amplitude, diffraction efficiency of the ±1 order, and surface roughness of one of the fabricated gratings are 0.99μm, 330nm, 30.56%, and 1.27nm, respectively. The new self-processing material is practical and promising for fabrication of micro-optical elements.

© 2005 Optical Society of America

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    [CrossRef] [PubMed]
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2005 (1)

M. He, X.-C. Yuan, J. Bu, and C. W. Tan, IEEE Photon. Technol. Lett. 17, 1223 (2005).
[CrossRef]

2004 (4)

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

M. He, X.-C. Yuan, J. Bu, and W. C. Cheong, Opt. Lett. 29, 1007 (2004).
[CrossRef] [PubMed]

M. He, X.-C. Yuan, and J. Bu, Opt. Lett. 29, 2004 (2004).
[CrossRef] [PubMed]

2003 (1)

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

2002 (1)

P. A. M. dos Santos, Opt. Commun. 212, 211 (2002).
[CrossRef]

2001 (1)

D. Blanc and S. Pelissier, Thin Solid Films 384, 251 (2001).
[CrossRef]

2000 (2)

M. He, X. J. Yi, and Z. H. Cheng, Chin. J. Lasers A27, 1097 (2000).

J. T. Sheridan and J. R. Lawrence, J. Opt. Soc. Am. A 17, 1108 (2000).
[CrossRef]

1999 (3)

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, Appl. Opt. 38, 6744 (1999).
[CrossRef]

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

1997 (1)

1994 (2)

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. (Bellingham) 33, 3556 (1994).
[CrossRef]

G. Zhao and P. Mouroulis, J. Mod. Opt. 41, 1929 (1994).
[CrossRef]

Andrews, M. P.

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, Appl. Opt. 38, 6744 (1999).
[CrossRef]

Ayras, P.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

Blanc, D.

D. Blanc and S. Pelissier, Thin Solid Films 384, 251 (2001).
[CrossRef]

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, Appl. Opt. 38, 6744 (1999).
[CrossRef]

Bu, J.

Carré, C.

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Chai, L.

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

Cheng, Z. H.

M. He, X. J. Yi, and Z. H. Cheng, Chin. J. Lasers A27, 1097 (2000).

Cheong, W. C.

Croutxé-Barghorn, C.

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Daschner, W.

Descour, M. R.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

dos Santos, P. A. M.

P. A. M. dos Santos, Opt. Commun. 212, 211 (2002).
[CrossRef]

Feuillade, M.

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Fort, A.

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Gale, M. T.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. (Bellingham) 33, 3556 (1994).
[CrossRef]

He, M.

M. He, X.-C. Yuan, J. Bu, and C. W. Tan, IEEE Photon. Technol. Lett. 17, 1223 (2005).
[CrossRef]

M. He, X.-C. Yuan, and J. Bu, Opt. Lett. 29, 2004 (2004).
[CrossRef] [PubMed]

M. He, X.-C. Yuan, J. Bu, and W. C. Cheong, Opt. Lett. 29, 1007 (2004).
[CrossRef] [PubMed]

M. He, X. J. Yi, and Z. H. Cheng, Chin. J. Lasers A27, 1097 (2000).

Honkanen, S.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

Hua, J.

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

Lawrence, J. R.

Lee, S. H.

Levy, R.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

Long, P.

Mager, L.

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Mouroulis, P.

G. Zhao and P. Mouroulis, J. Mod. Opt. 41, 1929 (1994).
[CrossRef]

Najafi, S. I.

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, Appl. Opt. 38, 6744 (1999).
[CrossRef]

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

Parriaux, O.

Pedersen, J.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. (Bellingham) 33, 3556 (1994).
[CrossRef]

Pelissier, S.

D. Blanc and S. Pelissier, Thin Solid Films 384, 251 (2001).
[CrossRef]

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, Appl. Opt. 38, 6744 (1999).
[CrossRef]

Peyghambarian, N.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

Rantala, J. T.

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

Rossi, M.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. (Bellingham) 33, 3556 (1994).
[CrossRef]

Saravanamuttu, K.

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

Sheridan, J. T.

Stein, R.

Tan, C. W.

M. He, X.-C. Yuan, J. Bu, and C. W. Tan, IEEE Photon. Technol. Lett. 17, 1223 (2005).
[CrossRef]

Tishchenko, A. V.

Wang, H. S.

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

Wang, Q. Y.

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

Wang, S. H.

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

Wu, C.

Yi, X. J.

M. He, X. J. Yi, and Z. H. Cheng, Chin. J. Lasers A27, 1097 (2000).

Yuan, X.-C.

Zhang, Z. G.

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

Zhao, G.

G. Zhao and P. Mouroulis, J. Mod. Opt. 41, 1929 (1994).
[CrossRef]

Zhong, Z. Q.

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

Zhou, J.

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

Adv. Mater. (Weinheim, Ger.) (1)

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, Adv. Mater. (Weinheim, Ger.) 11, 1508 (1999).
[CrossRef]

Appl. Opt. (2)

Chem. Phys. Lett. (1)

M. Feuillade, C. Croutxé-Barghorn, L. Mager, C. Carré, and A. Fort, Chem. Phys. Lett. 398, 151 (2004).
[CrossRef]

Chin. J. Lasers (1)

M. He, X. J. Yi, and Z. H. Cheng, Chin. J. Lasers A27, 1097 (2000).

IEEE Photon. Technol. Lett. (1)

M. He, X.-C. Yuan, J. Bu, and C. W. Tan, IEEE Photon. Technol. Lett. 17, 1223 (2005).
[CrossRef]

J. Mod. Opt. (1)

G. Zhao and P. Mouroulis, J. Mod. Opt. 41, 1929 (1994).
[CrossRef]

J. Opt. Soc. Am. A (1)

Opt. Commun. (3)

Z. Q. Zhong, J. Hua, J. Zhou, and S. H. Wang, Opt. Commun. 234, 7 (2004).
[CrossRef]

H. S. Wang, Z. G. Zhang, L. Chai, and Q. Y. Wang, Opt. Commun. 222, 69 (2003).
[CrossRef]

P. A. M. dos Santos, Opt. Commun. 212, 211 (2002).
[CrossRef]

Opt. Eng. (Bellingham) (1)

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. (Bellingham) 33, 3556 (1994).
[CrossRef]

Opt. Lett. (2)

Thin Solid Films (2)

D. Blanc and S. Pelissier, Thin Solid Films 384, 251 (2001).
[CrossRef]

P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, Thin Solid Films 352, 9 (1999).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Set-up of Lloyd’s mirror scheme.

Fig. 2
Fig. 2

Surface corrugation depth and refractive index of the solgel film as functions of exposure time.

Fig. 3
Fig. 3

3D surface profile of the fabricated quasi-sinusoidal phase grating in solgel material.

Fig. 4
Fig. 4

Fraunhofer diffraction pattern of the fabricated quasi-sinusoidal phase grating irradiated by a laser beam with a wavelength of 0.6328 μ m .

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

d = B λ 0 2 w ,
T = a h + b h 2 + c h 3 ,
t ( x 0 , y 0 ) = exp [ j Δ φ 2 sin ( 2 π x 0 d ) ] rect ( x 0 D ) rect ( y 0 D ) ,
Δ φ = ( 2 π λ ) n h ,
I ( x , y ) = D 4 sin c 2 ( D y λ z ) q = J q 2 ( Δ φ 2 ) sin c 2 [ D λ z ( x q λ z d ) ] ,
η i = J i 2 ( Δ φ 2 ) x i 1 x i 2 sin c 2 [ D λ z ( x i λ z d ) ] d x q = J q 2 ( Δ φ 2 ) + sin c 2 [ D λ z ( x q λ z d ) ] d x ,
J 0 ( Δ φ 2 ) = 0 .

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