Abstract

We report gain-saturated operation of a 13.2nm tabletop laser in Ni-like Cd at a 5Hz repetition rate. A gain–length product G×L=17.6 was obtained by heating a precreated plasma with 8ps duration Ti:sapphire laser pulses with an energy of only 1J impinging at a grazing angle of 23°. With an average power of 1μW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.

© 2005 Optical Society of America

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Corrections

J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, "Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium: erratum," Opt. Lett. 31, 129-129 (2006)
https://www.osapublishing.org/ol/abstract.cfm?uri=ol-31-1-129

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