Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material

Not Accessible

Your library or personal account may give you access

Abstract

As the complexity of microphotonic devices grows, the ability to precisely trim microring resonators becomes increasingly important. Photo-oxidation trimming uses UV irradiation to oxidize a cladding layer composed of polymerized hexamethyldisilane (6M2S) deposited with plasma-enhanced chemical vapor deposition (PECVD). PECVD 6M2S has optical properties that are compatible with microring devices, and its high cross linking renders it insoluble. Photo-oxidation decreases the refractive index of PECVD 6M2S by nearly 4%, permitting large resonance shifts that are not feasible with thermal trimming techniques. Resonance shifts from single-mode, 100μm diameter Si3N4 (n=2.2) rings were as large as 12.8nm for the TE mode and 23.5nm for the TM mode.

© 2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Tunable waveguides via photo-oxidation of plasma-polymerized organosilicon films

John P. Lock and Karen K. Gleason
Appl. Opt. 44(9) 1691-1697 (2005)

Post-fabrication resonance trimming of Si3N4 photonic circuits via localized thermal annealing of a sputter-deposited SiO2 cladding

Yanran Xie, Henry C. Frankis, Jonathan D. B. Bradley, and Andrew P. Knights
Opt. Mater. Express 11(8) 2401-2412 (2021)

Photo-induced trimming of coupled ring-resonator filters and delay lines in As2S3 chalcogenide glass

Antonio Canciamilla, Stefano Grillanda, Francesco Morichetti, Carlo Ferrari, Juejun Hu, J. David Musgraves, Kathleen Richardson, Anu Agarwal, Lionel C. Kimerling, and Andrea Melloni
Opt. Lett. 36(20) 4002-4004 (2011)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved