Abstract

The design and fabrication of a miniature fiber Fabry–Perot pressure sensor with a diameter of 125μm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor are achieved by on-line tuning of the diaphragm thickness during the sensor fabrication process. Various sensor prototypes were fabricated, demonstrating pressure ranges of from 0 to 40 kPa to 0 to 1 MPa. The maximum achieved sensitivity was 1.1rad40kPa at 1550 nm, and a pressure resolution of 300 Pa was demonstrated in practice. The presented design and fabrication technique offers a means of simple and low-cost disposable pressure sensor production.

© 2005 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription