Abstract

We present a novel method for measuring the frequency response of a diaphragm-based optical fiber Fabry–Perot interferometric pressure sensor. The impulse response of the sensor to the radiation pressure generated by an excimer laser pulse is measured. The Fourier transform of the impulse response yields the frequency response of the pressure sensor. Experimental results show that it is a convenient and efficient method for measurement of the frequency response of diaphragm-based pressure sensors.

© 2005 Optical Society of America

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References

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  1. J. Zakrzewski and K. Wróbel, IEEE Trans. Instrum. Meas. 51, 1358 (2002).
    [CrossRef]
  2. V. E. Bean, Metrologia 30, 737 (1993–1994).
    [CrossRef]
  3. J. P. Damion, Metrologia 30, 743 (1993–1994).
    [CrossRef]
  4. J. Lally and D. Cummiskey, Sensors 20 (4), 15 (2003).
  5. P. Lorrain and D. R. Corson, Electromagnetic Fields and Waves, 2nd ed. (Freeman, 1970), p. 543.
  6. M. Mansuripur, Opt. Express 12, 5375 (2004).
    [CrossRef] [PubMed]
  7. J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
    [CrossRef]
  8. Corning 7980 specifications: http:??www.corning.com?semiconductoroptics?products_services?pdf?h0607_hpfskrf_productsheet.pdf.
  9. D. N. Nikogosyan, Properties of Optical and Laser-Related Material: a Handbook (Wiley, 1997), p. 169.
  10. M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).
  11. J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
    [CrossRef]
  12. B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, Appl. Opt. 42, 3241 (2003).
    [CrossRef] [PubMed]

2005

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

2004

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

M. Mansuripur, Opt. Express 12, 5375 (2004).
[CrossRef] [PubMed]

2003

2002

J. Zakrzewski and K. Wróbel, IEEE Trans. Instrum. Meas. 51, 1358 (2002).
[CrossRef]

Bean, V. E.

V. E. Bean, Metrologia 30, 737 (1993–1994).
[CrossRef]

Cooper, K.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

Cooper, K. L.

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Corson, D. R.

P. Lorrain and D. R. Corson, Electromagnetic Fields and Waves, 2nd ed. (Freeman, 1970), p. 543.

Cummiskey, D.

J. Lally and D. Cummiskey, Sensors 20 (4), 15 (2003).

Damion, J. P.

J. P. Damion, Metrologia 30, 743 (1993–1994).
[CrossRef]

Deng, J.

Giovanni, M. D.

M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).

Han, M.

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Kim, D. W.

Lally, J.

J. Lally and D. Cummiskey, Sensors 20 (4), 15 (2003).

Lorrain, P.

P. Lorrain and D. R. Corson, Electromagnetic Fields and Waves, 2nd ed. (Freeman, 1970), p. 543.

Mansuripur, M.

Nikogosyan, D. N.

D. N. Nikogosyan, Properties of Optical and Laser-Related Material: a Handbook (Wiley, 1997), p. 169.

Peng, W.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

Pickrell, G.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Wang, A.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, Appl. Opt. 42, 3241 (2003).
[CrossRef] [PubMed]

Wang, X.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Wróbel, K.

J. Zakrzewski and K. Wróbel, IEEE Trans. Instrum. Meas. 51, 1358 (2002).
[CrossRef]

Xiao, H.

Xu, J.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Yu, B.

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

B. Yu, D. W. Kim, J. Deng, H. Xiao, and A. Wang, Appl. Opt. 42, 3241 (2003).
[CrossRef] [PubMed]

Zakrzewski, J.

J. Zakrzewski and K. Wróbel, IEEE Trans. Instrum. Meas. 51, 1358 (2002).
[CrossRef]

Zhu, Y.

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Appl. Opt.

IEEE Photon. Technol. Lett.

J. Xu, G. Pickrell, X. Wang, W. Peng, K. Cooper, and A. Wang, IEEE Photon. Technol. Lett. 17, 870 (2005).
[CrossRef]

IEEE Trans. Instrum. Meas.

J. Zakrzewski and K. Wróbel, IEEE Trans. Instrum. Meas. 51, 1358 (2002).
[CrossRef]

Metrologia

V. E. Bean, Metrologia 30, 737 (1993–1994).
[CrossRef]

J. P. Damion, Metrologia 30, 743 (1993–1994).
[CrossRef]

Opt. Express

Proc. SPIE

J. Xu, G. Pickrell, B. Yu, M. Han, Y. Zhu, X. Wang, K. L. Cooper, and A. Wang, Proc. SPIE 5590, 1 (2004).
[CrossRef]

Sensors

J. Lally and D. Cummiskey, Sensors 20 (4), 15 (2003).

Other

P. Lorrain and D. R. Corson, Electromagnetic Fields and Waves, 2nd ed. (Freeman, 1970), p. 543.

Corning 7980 specifications: http:??www.corning.com?semiconductoroptics?products_services?pdf?h0607_hpfskrf_productsheet.pdf.

D. N. Nikogosyan, Properties of Optical and Laser-Related Material: a Handbook (Wiley, 1997), p. 169.

M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).

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Figures (2)

Fig. 1
Fig. 1

Sensor structure and experimental setup for frequency-response measurement.

Fig. 2
Fig. 2

Time-domain response of a pressure sensor to the radiation pressure pulse and its Fourier transform: (a) time-domain response, (b) Fourier transform.

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

P r = F A = η P c A = η D c ,
D = E A T = 20 mJ 5 mm 2 × 20 ns = 0.2 × 10 12 [ W m 2 ] ,
S = 3 ( 1 μ 2 ) 16 E r 4 h 3 2.1 × 10 3 [ nm Pa ] ,
f 0 = 2.742 × 10 9 h r 2 [ Hz ] = 2.742 × 10 9 60 650 2 [ Hz ] 389.4 k [ Hz ] ,
S ( j ω ) = R ( j ω ) E ( j ω ) ,

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