Abstract

We analyze statistical fluctuations in the pulse-to-pulse spatial fluence distribution of a highly multimode F2 laser beam and the influence that coherence effects have on the attainable smoothness of an ablated surface. The magnitude of fluctuations is predicted to be a few percent, with associated roughness increasing as m12, where m is the number of ablation pulses. By use of a white-light optical interferometer, measurements have been made of roughness induced on N-BK7 glass surfaces ablated with a 157-nm laser, and reasonable agreement with predictions based on this roughening mechanism has been found.

© 2005 Optical Society of America

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    [CrossRef]

2003

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

2002

K. Obata, K. Sugioka, T. Akane, K. Midorikawa, N. Aoki, and K. Toyoda, Opt. Lett. 27, 330 (2002).
[CrossRef]

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

2001

C. J. Sansonetti, J. Reader, and K. Vogler, Appl. Opt. 40, 1974 (2001).
[CrossRef]

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

1999

1993

A. E. Siegman and S. W. Townsend, IEEE J. Quantum Electron. 29, 1212 (1993).
[CrossRef]

S. Kuper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993).
[CrossRef]

1990

C. Skordoulis, S. Spyrou, and A. C. Cefalas, Appl. Phys. B 51, 141 (1990).
[CrossRef]

Akane, T.

Aoki, N.

Bates, A. K.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Bloomstein, T. M.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Borghi, R.

Brannon, J.

S. Kuper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993).
[CrossRef]

Brannon, K.

S. Kuper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993).
[CrossRef]

Cefalas, A. C.

C. Skordoulis, S. Spyrou, and A. C. Cefalas, Appl. Phys. B 51, 141 (1990).
[CrossRef]

Dyer, P. E.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

Ersoz, M.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

Fedynyshyn, T. H.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Fletcher, P. D.I.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

Gori, F.

Guattari, G.

Herman, P. R.

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Ihlemann, J.

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Kunz, R. R.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Kuper, S.

S. Kuper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993).
[CrossRef]

Libermam, V.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Marowsky, G.

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Maswadi, S. M.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

Midorikawa, K.

Obata, K.

Paunov, V. N.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

Reader, J.

Rothschild, M.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Saleh, B

B Saleh, Photoelectron Statistics, Vol. 6 of Springer Series in Optical Sciences (Springer-Verlag, 1978).
[CrossRef]

Sansonetti, C. J.

Santarsiero, M.

Schafer, D.

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

Siegman, A. E.

A. E. Siegman and S. W. Townsend, IEEE J. Quantum Electron. 29, 1212 (1993).
[CrossRef]

Skordoulis, C.

C. Skordoulis, S. Spyrou, and A. C. Cefalas, Appl. Phys. B 51, 141 (1990).
[CrossRef]

Snelling, H. V.

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

Spyrou, S.

C. Skordoulis, S. Spyrou, and A. C. Cefalas, Appl. Phys. B 51, 141 (1990).
[CrossRef]

Sugioka, K.

Switkes, M.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

Townsend, S. W.

A. E. Siegman and S. W. Townsend, IEEE J. Quantum Electron. 29, 1212 (1993).
[CrossRef]

Toyoda, K.

Vogler, K.

Walton, C. D.

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

Appl. Opt.

Appl. Phys. A

D. Schafer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A 72, 377 (2001).
[CrossRef]

P. E. Dyer, S. M. Maswadi, C. D. Walton, M. Ersoz, P. D.I. Fletcher, and V. N. Paunov, Appl. Phys. A 77, 391 (2003).
[CrossRef]

S. Kuper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993).
[CrossRef]

Appl. Phys. B

C. Skordoulis, S. Spyrou, and A. C. Cefalas, Appl. Phys. B 51, 141 (1990).
[CrossRef]

IBM J. Res. Dev.

A. K. Bates, M. Rothschild, T. M. Bloomstein, T. H. Fedynyshyn, R. R. Kunz, V. Libermam, and M. Switkes, IBM J. Res. Dev. 45, 605 (2001).
[CrossRef]

IEEE J. Quantum Electron.

A. E. Siegman and S. W. Townsend, IEEE J. Quantum Electron. 29, 1212 (1993).
[CrossRef]

Opt. Lett.

Proc. SPIE

P. E. Dyer, S. M. Maswadi, H. V. Snelling, and C. D. Walton, Proc. SPIE 4637, 218 (2002).
[CrossRef]

Other

B Saleh, Photoelectron Statistics, Vol. 6 of Springer Series in Optical Sciences (Springer-Verlag, 1978).
[CrossRef]

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Figures (2)

Fig. 1
Fig. 1

Optical micrographs of a VUV F 2 laser-ablated N-BK7 glass sample: (a) unirradiated, (b) 1 pulse, and (c) 100 pulses at a laser fluence of 1100 mJ cm 2 . (Differential interference contrast, 500 × magnification).

Fig. 2
Fig. 2

rms surface roughness versus laser pulse number for laser-ablated N-BK7 glass at (triangles) 1100 mJ cm 2 , (circles) 970 mJ cm 2 , (squares) 670 mJ cm 2 . Insets, height distributions for 1, 20, and 100 laser pulses at 1100 mJ cm 2 . The curves are based on theoretical predictions.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

d p = 1 2 π σ exp [ ( F F ) 2 2 σ 2 ] d F .
δ F L F L [ 1 exp ( F L F S ) ] F S F L 1 ( f π Δ ν τ P ) 1 2 ,
σ X = X 0 exp ( F A F ) F A F [ 1 exp ( F L F S ) ] F S F L 1 ( f π Δ ν τ P ) 1 2 .

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