Abstract

A complete module for single-photon counting and timing is demonstrated in a single chip. Features comparable with or better than commercially available macroscopic modules are obtained by integration of an active-quenching and active-reset circuit in complementary metal-oxide semiconductor technology together with a single-photon avalanche diode (SPAD). The integrated SPAD has a 12-μm-diameter sensitive area and operates with an overvoltage above breakdown adjustable up to 20V. With a 5-V overvoltage the photon detection efficiency peaks above 40% around 500nm, and the dark-counting rate is lower than 600  countss at room temperature. The overall counting dead time is 33ns.

© 2005 Optical Society of America

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