Abstract

We suggest and demonstrate a new method for wave-front analysis based on common-path phase-shift interferometry. We introduce a formalism and an iterative mathematical algorithm in which the wave front is transformed, modified, and inversely transformed. The resulting intensity data are sufficient to reconstruct the entire wave front. In a more restricted case, in which the wave-front modifications are arbitrarily applied over arbitrary spatial regions of the wave front, the wave front is reconstructed semianalytically by use of a model that allows a local solution, followed by an iterative algorithm. Measurement results indicating that the suggested approach has an improved measurement accuracy with respect to existing quantitative phase measurement methods are presented.

© 2004 Optical Society of America

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References

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2003

2002

E. Lopez-Lago and R. de-la-Fuente, J. Opt. A 4, 299 (2002).
[CrossRef]

R. W. Gerchberg, J. Mod. Opt. 49, 1185 (2002).
[CrossRef]

2001

1994

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

C. R. Mercer and K. Creath, Opt. Lett. 19, 916 (1994).
[CrossRef] [PubMed]

1992

1978

Beresnev, L. A.

Creath, K.

de-la-Fuente, R.

E. Lopez-Lago and R. de-la-Fuente, J. Opt. A 4, 299 (2002).
[CrossRef]

Fienup, J. R.

Gerchberg, R. W.

R. W. Gerchberg, J. Mod. Opt. 49, 1185 (2002).
[CrossRef]

Greenaway, A. H.

Justh, E. W.

Kadono, H.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Kawata, S.

Lopez-Lago, E.

E. Lopez-Lago and R. de-la-Fuente, J. Opt. A 4, 299 (2002).
[CrossRef]

Mercer, C. R.

Noda, T.

Ogusu, M.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Toyooka, S.

H. Kadono, M. Ogusu, and S. Toyooka, Opt. Commun. 110, 391 (1994).
[CrossRef]

Vorontsov, M. A.

Woods, S. C.

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Figures (3)

Fig. 1
Fig. 1

Schematic description of the modifications performed on an expected wave front f to obtain the intensities required for the newly suggested method. These intensities are then processed to fully reconstruct the wave front.

Fig. 2
Fig. 2

Three-dimensional view (a) and profile (b) of a measurement of a certified standard of 180.0±2.0nm step height. The measured height of the standard is 180.4 nm.

Fig. 3
Fig. 3

Maximal error (over the entire wave front) in nanometers in the wave-front reconstruction as a function of the iteration number of αx,y.

Equations (9)

Equations on this page are rendered with MathJax. Learn more.

Ijx,y=T-1Tfx,yHju,v2,    j=1,2,,
f1x,y=T-1TP1x,yH1u,v.
P2x,y=T-1Tf1x,yH2u,vT-1Tf1x,yH2u,vI2x,y.
f2x,y=T-1TP2x,yH2u,v.
P3x,y=T-1Tf2x,yH1u,vT-1Tf2x,yH1u,vI1x,y.
Hju,v=1-Gu,v+Gu,vkj expiθj,
Ijx,y=Ax,y+kj expiθj-1Sx,y×exp-iψx,y2,
Sx,yT-1Tfx,yGu,vSx,yexpiαx,y,
Sx,y=Ax,yexpiψx,ySx,ySx,y*T-1Gu,v,

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