Abstract

ZrO2 films are deposited by the electron-beam evaporation method. Parts of the prepared samples are posttreated with oxygen plasma at the environment temperature. The laser-induced damage threshold (LIDT) of the films increases from 15.9 to 23.1 J/cm2 after treatment with oxygen plasma. Compared with that of the as-grown samples, significant reduction of the average microdefect density and absorption are found after oxygen-plasma posttreatment. These results indicate that the oxygen-plasma posttreatment technique is an effective and simple method for reducing the microdefect density and absorption to improve the LIDT.

© 2004 Optical Society of America

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2004 (1)

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

2003 (1)

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

2002 (1)

L. Yan, J. A. Woollam, and E. Franke, J. Vac. Sci. Technol. A 20, 693 (2002).
[CrossRef]

2000 (2)

H. Y. Hu, Z. X. Fan, and Q. Zhao, Laser Phys. 10, 633 (2000).

H. K. Jang, S. K. Lee, and C. E. Lee, Appl. Phys. Lett. 76, 882 (2000).
[CrossRef]

1997 (1)

J. Dijon, T. Poiroux, and C. Desrumaux, Proc. SPIE 2966, 3156 (1997).

1996 (1)

1993 (1)

1981 (1)

T. W. Walker, A. H. Guenther, and P. E. Nielsen, IEEE J. Quantum Electron. QE-17, 2041 (1981).
[CrossRef]

1977 (1)

Anton, B.

Bradbury, R.

Chow, R.

Desrumaux, C.

J. Dijon, T. Poiroux, and C. Desrumaux, Proc. SPIE 2966, 3156 (1997).

Dijon, J.

J. Dijon, T. Poiroux, and C. Desrumaux, Proc. SPIE 2966, 3156 (1997).

Eva, E.

Falabella, S.

Fan, Z. X.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

H. Y. Hu, Z. X. Fan, and Q. Zhao, Laser Phys. 10, 633 (2000).

Fang, M.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

Franke, E.

L. Yan, J. A. Woollam, and E. Franke, J. Vac. Sci. Technol. A 20, 693 (2002).
[CrossRef]

Gong, H.

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

Guenther, A. H.

T. W. Walker, A. H. Guenther, and P. E. Nielsen, IEEE J. Quantum Electron. QE-17, 2041 (1981).
[CrossRef]

Hacker, E.

He, H. B.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

Henking, R.

Hu, H. Y.

H. Y. Hu, Z. X. Fan, and Q. Zhao, Laser Phys. 10, 633 (2000).

Huang, J. B.

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

Jang, H. K.

H. K. Jang, S. K. Lee, and C. E. Lee, Appl. Phys. Lett. 76, 882 (2000).
[CrossRef]

Kaiser, N.

Kozlowski, M. R.

Lee, C. E.

H. K. Jang, S. K. Lee, and C. E. Lee, Appl. Phys. Lett. 76, 882 (2000).
[CrossRef]

Lee, S. K.

H. K. Jang, S. K. Lee, and C. E. Lee, Appl. Phys. Lett. 76, 882 (2000).
[CrossRef]

Loomis, G. E.

Mademann, D.

Mann, K.

Milam, D.

Nielsen, P. E.

T. W. Walker, A. H. Guenther, and P. E. Nielsen, IEEE J. Quantum Electron. QE-17, 2041 (1981).
[CrossRef]

Picard, R.

Poiroux, T.

J. Dijon, T. Poiroux, and C. Desrumaux, Proc. SPIE 2966, 3156 (1997).

Rainer, F.

Raupach, L.

Ristau, D.

Shao, J. D.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

Stolz, C. J.

Tian, G. L.

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

Walker, T. W.

T. W. Walker, A. H. Guenther, and P. E. Nielsen, IEEE J. Quantum Electron. QE-17, 2041 (1981).
[CrossRef]

Wang, T.

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

Wang, Y. J.

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

Weissbrodt, P.

Woollam, J. A.

L. Yan, J. A. Woollam, and E. Franke, J. Vac. Sci. Technol. A 20, 693 (2002).
[CrossRef]

Yan, L.

L. Yan, J. A. Woollam, and E. Franke, J. Vac. Sci. Technol. A 20, 693 (2002).
[CrossRef]

Zhan, M. Q.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

Zhang, D. P.

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

Zhao, Q.

H. Y. Hu, Z. X. Fan, and Q. Zhao, Laser Phys. 10, 633 (2000).

Zhao, Y.

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

Appl. Opt. (3)

Appl. Phys. Lett. (1)

H. K. Jang, S. K. Lee, and C. E. Lee, Appl. Phys. Lett. 76, 882 (2000).
[CrossRef]

Appl. Surf. Sci. (1)

Y. Zhao, Y. J. Wang, H. Gong, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 210, 353 (2003).

Chin. Opt. Lett. (1)

D. P. Zhang, M. Q. Zhan, M. Fang, H. B. He, J. D. Shao, and Z. X. Fan, Chin. Opt. Lett. 29, 364 (2004).
[CrossRef]

IEEE J. Quantum Electron. (1)

T. W. Walker, A. H. Guenther, and P. E. Nielsen, IEEE J. Quantum Electron. QE-17, 2041 (1981).
[CrossRef]

J. Vac. Sci. Technol. A (1)

L. Yan, J. A. Woollam, and E. Franke, J. Vac. Sci. Technol. A 20, 693 (2002).
[CrossRef]

Laser Phys. (1)

H. Y. Hu, Z. X. Fan, and Q. Zhao, Laser Phys. 10, 633 (2000).

Proc. SPIE (1)

J. Dijon, T. Poiroux, and C. Desrumaux, Proc. SPIE 2966, 3156 (1997).

Other (2)

G. L. Tian, J. B. Huang, T. Wang, H. B. He, and J. D. Shao, “Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature,” Appl. Surf. Sci. (to be published).

ISO 11254-1:2000, Lasers and laser-related equipment—Determination of laser-induced damage threshold of optical surfaces—Part 1: 1-on-1 test, (International Organization for Standardization, Geneva, Switzerland, 2000).

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Figures (5)

Fig. 1
Fig. 1

Microdefect density variation of the samples after treatment with low-energy oxygen plasma.

Fig. 2
Fig. 2

Absorption of the samples before and after being treated with low-energy oxygen plasma.

Fig. 3
Fig. 3

LIDT of the samples.

Fig. 4
Fig. 4

Damage morphologies of the samples: (a) as-deposited sample (22.6 J/cm2), (b) treated sample (26.3 J/cm2).

Fig. 5
Fig. 5

XRD spectra of the samples.

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