Abstract

We have designed a high-efficiency broadband grating coupler for coupling between silicon-on-insulator (SOI) waveguides and optical fibers. The grating is only 13 µm long and 12 µm wide, and the size of the grooves is optimized numerically. For TE polarization the coupling loss to single-mode fiber is below 1 dB over a 35-nm wavelength range when using SOI with a two-pair bottom reflector. The tolerances to fabrication errors are also calculated.

© 2004 Optical Society of America

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References

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  1. T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
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    [CrossRef]
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    [CrossRef] [PubMed]
  9. R. Waldhausl, B. Schnabel, P. Dannberg, E. Kley, A. Brauer, and W. Karthe, Appl. Opt. 36, 9383 (1997).
    [CrossRef]
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    [CrossRef]
  12. M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
    [CrossRef]

2003 (1)

2002 (3)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
[CrossRef]

2001 (1)

P. Bienstman and R. Baets, Opt. Quantum Electron. 33, 327 (2001).
[CrossRef]

2000 (1)

1997 (1)

1996 (1)

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

1993 (1)

Baets, R.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

P. Bienstman and R. Baets, Opt. Quantum Electron. 33, 327 (2001).
[CrossRef]

Bates, K. A.

Bienstman, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

P. Bienstman and R. Baets, Opt. Quantum Electron. 33, 327 (2001).
[CrossRef]

Bogaerts, W.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Brauer, A.

Burke, J. J.

Dannberg, P.

Dosunmu, O.

M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
[CrossRef]

Emsley, M. K.

M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
[CrossRef]

Gualous, H.

Johnson, J. M.

J. M. Johnson and Y. Rahmat-Samii, in Electromagnetic Optimization by Genetic Algorithms, Y. Rahmat-Samii and E. Michielsen, eds. (Wiley, New York, 1999), pp. 1–27.

Karthe, W.

Kley, E.

Koster, A.

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Laval, S.

Layadi, A.

Lee, D. L.

D. L. Lee, Electromagnetic Principles of Integrated Optics (Wiley, New York, 1986).

Li, L.

McNab, S. J.

Moll, N.

Morita, H.

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Neumann, E. G.

E. G. Neumann, Single-Mode Fibers—Fundamentals (Springer-Verlag, Berlin, 1988).
[CrossRef]

Orobtchouk, R.

Parriaux, O.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

Pascal, D.

Rahmat-Samii, Y.

J. M. Johnson and Y. Rahmat-Samii, in Electromagnetic Optimization by Genetic Algorithms, Y. Rahmat-Samii and E. Michielsen, eds. (Wiley, New York, 1999), pp. 1–27.

Roncone, R. L.

Schnabel, B.

Shoji, T.

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Sychugov, V. A.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

Taillaert, D.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Tishchenko, A. V.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

Tsuchizawa, T.

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Unlu, M. S.

M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
[CrossRef]

Usievich, B. A.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

Vlasov, Y. A.

Waldhausl, R.

Wanatabe, T.

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Yamada, K.

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

Appl. Opt. (3)

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Wanatabe, K. Yamada, and H. Morita, Electron. Lett. 38, 1669 (2002).
[CrossRef]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

M. K. Emsley, O. Dosunmu, and M. S. Unlu, IEEE J. Sel. Top. Quantum Electron. 8, 948 (2002).
[CrossRef]

Opt. Eng. (1)

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, Opt. Eng. 35, 3092 (1996).
[CrossRef]

Opt. Express (1)

Opt. Quantum Electron. (1)

P. Bienstman and R. Baets, Opt. Quantum Electron. 33, 327 (2001).
[CrossRef]

Other (3)

E. G. Neumann, Single-Mode Fibers—Fundamentals (Springer-Verlag, Berlin, 1988).
[CrossRef]

D. L. Lee, Electromagnetic Principles of Integrated Optics (Wiley, New York, 1986).

J. M. Johnson and Y. Rahmat-Samii, in Electromagnetic Optimization by Genetic Algorithms, Y. Rahmat-Samii and E. Michielsen, eds. (Wiley, New York, 1999), pp. 1–27.

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Figures (6)

Fig. 1
Fig. 1

SOI grating coupler problem.

Fig. 2
Fig. 2

Fundamental TE mode of a 12µm-wide SOI strip waveguide. Exx,yExxExy.

Fig. 3
Fig. 3

Gaussian output beam and corresponding αz calculated according to Eq. (3). The dotted curve is the resulting output from the simulation after optimization.

Fig. 4
Fig. 4

Coupling efficiency to the fiber for the coupler in a SOI waveguide and SOI waveguide with a bottom reflector. DBR, distributed Bragg reflector.

Fig. 5
Fig. 5

SOI coupler with a bottom reflector. The plotted field is the real part of Ex.

Fig. 6
Fig. 6

Coupling efficiency for different etch depths.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

η=SE×Hfib*dS2,
η=ExEy=0,zA exp-x-x02+z-z02w02×expjnfib2πλz sin θdxdz2.
2αz=G2z1-0zG2tdt,

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