Abstract

Silicon-based thin-film polarizers operating in the visible and near-infraed spectral range are fabricated by electrochemical etching of bulk silicon wafers. Anisotropically etched (110) porous silicon layers exhibit a strong in-plane anisotropy of the refractive index. Stackes of alternating layers with different mean refractive indices and thicknesses act as dichroic Bragg reflectors or microcavities, respectively. Both structures have two distinct reflection and transmission bands depending on the polarization of the incident linearly polarized light. Planar polarizers are realized through the combination, in one structure, of a dichroic reflector with either a second reflector or a microcavity with different spectral responses.

© 2004 Optical Society of America

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    [CrossRef]

2003

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

2002

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

2001

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

2000

V. Mulloni and L. Pavesi, Appl. Phys. Lett. 76, 2523 (2000).
[CrossRef]

A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 77, 3704 (2000).
[CrossRef]

O. Bisi, S. Ossicini, and L. Pavesi, Surf. Sci. Rep. 38, 1 (2000).

1997

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

1996

M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996).
[CrossRef]

1995

C. Mazzoleni and L. Pavesi, Appl. Phys. Lett. 67, 2983 (1995).
[CrossRef]

1994

G. Vincent, Appl. Phys. Lett. 64, 2367 (1994).
[CrossRef]

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Araki, M.

M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996).
[CrossRef]

Arrand, H. F.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

Benson, T. M.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

Berger, M. G.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Bisi, O.

O. Bisi, S. Ossicini, and L. Pavesi, Surf. Sci. Rep. 38, 1 (2000).

Calcott, P. D. J.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

Canham, L. T.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

Cullis, A. G.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

Dieker, C.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Diener, J.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

Fauchet, P. M.

A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 77, 3704 (2000).
[CrossRef]

Fujii, M.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

Gross, E.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

Grosse, P.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Heckler, H.

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

Koch, F.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

Koshida, N.

M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996).
[CrossRef]

Kovalev, D.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

Koyama, H.

M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996).
[CrossRef]

Krueger, M. G.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

Künzner, N.

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

Loni, A.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

Lopez, A.

A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 77, 3704 (2000).
[CrossRef]

Lüth, H.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Mazzoleni, C.

C. Mazzoleni and L. Pavesi, Appl. Phys. Lett. 67, 2983 (1995).
[CrossRef]

Mulloni, V.

V. Mulloni and L. Pavesi, Appl. Phys. Lett. 76, 2523 (2000).
[CrossRef]

Munder, H.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Ossicini, S.

O. Bisi, S. Ossicini, and L. Pavesi, Surf. Sci. Rep. 38, 1 (2000).

Pavesi, L.

O. Bisi, S. Ossicini, and L. Pavesi, Surf. Sci. Rep. 38, 1 (2000).

V. Mulloni and L. Pavesi, Appl. Phys. Lett. 76, 2523 (2000).
[CrossRef]

C. Mazzoleni and L. Pavesi, Appl. Phys. Lett. 67, 2983 (1995).
[CrossRef]

Polisski, G.

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

Theiß, W.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Thönissen, M.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Timoshenko, V. Yu.

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

N. Künzner, D. Kovalev, J. Diener, E. Gross, V. Yu. Timoshenko, G. Polisski, F. Koch, and M. Fujii, Opt. Lett. 26, 1265 (2001).
[CrossRef]

Vescan, L.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Vincent, G.

G. Vincent, Appl. Phys. Lett. 64, 2367 (1994).
[CrossRef]

Wernke, M.

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Appl. Phys. Lett.

M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996).
[CrossRef]

C. Mazzoleni and L. Pavesi, Appl. Phys. Lett. 67, 2983 (1995).
[CrossRef]

V. Mulloni and L. Pavesi, Appl. Phys. Lett. 76, 2523 (2000).
[CrossRef]

A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 77, 3704 (2000).
[CrossRef]

D. Kovalev, G. Polisski, J. Diener, H. Heckler, N. Künzner, V. Yu. Timoshenko, and F. Koch, Appl. Phys. Lett. 78, 916 (2001).
[CrossRef]

G. Vincent, Appl. Phys. Lett. 64, 2367 (1994).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, V. Yu. Timoshenko, G. Polisski, and F. Koch, Appl. Phys. Lett. 78, 3887 (2001).
[CrossRef]

Electron. Lett.

H. F. Arrand, T. M. Benson, A. Loni, M. G. Krueger, M. Thönissen, and H. Lüth, Electron. Lett. 33, 1724 (1997).
[CrossRef]

J. Appl. Phys.

A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
[CrossRef]

J. Diener, N. Künzner, D. Kovalev, E. Gross, and F. Koch, J. Appl. Phys. 91, 6704 (2002).
[CrossRef]

J. Phys. D

M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Lüth, H. Munder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D 27, 1333 (1994).
[CrossRef]

Opt. Lett.

Phys. Status Solidi A

J. Diener, N. Künzner, D. Kovalev, E. Gross, F. Koch, and M. Fujii, Phys. Status Solidi A 197, 582 (2003).
[CrossRef]

Surf. Sci. Rep.

O. Bisi, S. Ossicini, and L. Pavesi, Surf. Sci. Rep. 38, 1 (2000).

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Figures (3)

Fig. 1
Fig. 1

a, Polarization-resolved transmission spectra of the device described in the text. b, Operation principle of a Si-based polarizer assembled from two dichroic reflectors with different spectral responses. c, Polarization-resolved transmission spectra of the same structure in the spectral range from 680 to 690 nm. The solid line (dotted curve) corresponds to incident light polarized along the 11¯0001 direction. DBR, distributed Bragg reflector.

Fig. 2
Fig. 2

a, Operation principle of a Si-based polarizer (combination of reflector and microcavity). b, Polarization-resolved transmission spectra of the device in arbitrary units. c, Polar plot of the polarization pattern of the transmitted, initially randomly polarized light of a He–Ne laser, in arbitrary units. MC, microcavity.

Fig. 3
Fig. 3

a, Polarization-resolved transmission spectra of a Si-based infrared polarizer. b, Polarization-resolved transmission spectra of the same structure in the spectral range from 1330 to 1350 nm.

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