Abstract

Multimicrogratings are one-off written on silicate glass by two interfered femtosecond pulsed laser beams with the aid of a mask. The period and depth of the multimicrogratings are revealed by optical microscopy and atomic force microscopy. The depth is dependent on both the colliding angle between the two interfered laser beams and the laser pulse energy, but the period relies on the colliding angle only. We also observe a series of grooves formed at the middle of each bulge of the multimicrogratings and attribute it to the higher-order modulation arising from second-harmonic generation of the femtosecond laser pulse during the one-off writing processes.

© 2004 Optical Society of America

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  1. S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
    [CrossRef]
  2. S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).
  3. K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
    [CrossRef]
  4. K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
    [CrossRef]
  5. K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
    [CrossRef]
  6. Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
    [CrossRef]
  7. K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
    [CrossRef]
  8. Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
    [CrossRef]
  9. Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
    [CrossRef]
  10. Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
    [CrossRef]
  11. Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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2004 (2)

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

2003 (3)

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
[CrossRef]

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

2002 (7)

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
[CrossRef] [PubMed]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
[CrossRef]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

J. Si, J. Qiu, and K. Hirao, Appl. Phys. B 75, 847 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

2001 (1)

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

2000 (1)

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

1997 (1)

1994 (1)

P. G. Kazansky and P. St. J. Russell, Opt. Commun. 110, 611 (1994).
[CrossRef]

1991 (1)

Brueck, S. R. J.

Ducasse, A.

Freysz, E.

Guo, J.

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

Hirano, M.

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

Hirao, K.

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

J. Si, J. Qiu, and K. Hirao, Appl. Phys. B 75, 847 (2002).
[CrossRef]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

Hosono, H.

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

Ishizuka, T.

Ito, N.

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

Itoh, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
[CrossRef] [PubMed]

Jiang, X.

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

Jiang, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Kamiya, T.

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

Kawamura, K.

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

Kazansky, P. G.

P. G. Kazansky and P. St. J. Russell, Opt. Commun. 110, 611 (1994).
[CrossRef]

Le Calvez, A.

Li, Y.

Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
[CrossRef] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Maeda, M.

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
[CrossRef]

Mukherjee, N.

Myers, R. A.

Nakata, Y.

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
[CrossRef]

Nishii, J.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Ogawa, T.

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

Okada, T.

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
[CrossRef]

Qian, G.

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

Qiu, J.

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

J. Si, J. Qiu, and K. Hirao, Appl. Phys. B 75, 847 (2002).
[CrossRef]

Qu, S.

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

Russell, P. St. J.

P. G. Kazansky and P. St. J. Russell, Opt. Commun. 110, 611 (1994).
[CrossRef]

Sarukura, N.

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

Shen, Y.

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

Shinagawa, T.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Si, J.

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

J. Si, J. Qiu, and K. Hirao, Appl. Phys. B 75, 847 (2002).
[CrossRef]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

Wang, M.

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

Watanabe, W.

Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
[CrossRef] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Yamada, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, Opt. Express 10, 1173 (2002), http://www.opticsexpress.org .
[CrossRef] [PubMed]

Zeng, H.

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

Zhai, J.

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

Zhao, C.

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

Zhou, Z.

Zhu, C.

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

Appl. Phys. A (1)

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 77, 399 (2003).
[CrossRef]

Appl. Phys. B (2)

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. B 71, 119 (2000).
[CrossRef]

J. Si, J. Qiu, and K. Hirao, Appl. Phys. B 75, 847 (2002).
[CrossRef]

Appl. Phys. Lett. (8)

G. Qian, J. Guo, M. Wang, J. Si, J. Qiu, and K. Hirao, Appl. Phys. Lett. 83, 2327 (2003).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, N. Ito, and H. Hosono, Appl. Phys. Lett. 79, 1228 (2002).
[CrossRef]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, Appl. Phys. Lett. 78, 1038 (2001).
[CrossRef]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, Appl. Phys. Lett. 80, 1508 (2002).
[CrossRef]

K. Kawamura, M. Hirano, T. Kamiya, N. Sarukura, and H. Hosono, Appl. Phys. Lett. 81, 1137 (2002).
[CrossRef]

Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. Lett. 81, 4239 (2002).
[CrossRef]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, Appl. Phys. Lett. 80, 359 (2002).
[CrossRef]

S. Qu, J. Qiu, C. Zhao, X. Jiang, H. Zeng, C. Zhu, and K. Hirao, Appl. Phys. Lett. 84, 2046 (2004).
[CrossRef]

Chem. Phys. Lett. (1)

S. Qu, H. Zeng, C. Zhao, J. Qiu, and C. Zhu, Chem. Phys. Lett. 384, 382 (2004).

Jpn. J. Appl. Phys. Part 2 (1)

Y. Nakata, T. Okada, and M. Maeda, Jpn. J. Appl. Phys. Part 2 42, L379 (2003).
[CrossRef]

Opt. Commun. (1)

P. G. Kazansky and P. St. J. Russell, Opt. Commun. 110, 611 (1994).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

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Figures (5)

Fig. 1
Fig. 1

Experimental setup for the one-off writing of multimicrogratings by a single femtosecond laser pulse. M’s, mirrors; BS, beam splitter.

Fig. 2
Fig. 2

Data mask for multimicrograting formation.

Fig. 3
Fig. 3

Optical microscopic observation of (a) a holographic micrograting and (b) a multimicrograting formed on silicate glass with a period of 1.1 µm.

Fig. 4
Fig. 4

AFM image of a multimicrograting encoded with an energy of 70 µJ for each interfered beam and a colliding angle of 40°.

Fig. 5
Fig. 5

AFM image of a multimicrograting encoded with an energy of 100 µJ and a colliding angle of 85°.

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